Measurement System Based on Multi-Wavelength Interferometry for Long Gauge Block Calibration

Wengierow, Michal; Sałbut, Leszek; Ramotowski, Zbigniew; Szumski, Robert; Szykiedans, K.

doi:10.2478/mms-2013-0041

Cited by 9 publications

(4 citation statements)

References 13 publications

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“…This paper is focused on the variable wavelength interferometry (VAWI) [1][2][3][4] based on a standard microscope. Except our approach, there are many other interferometric systems designed for measuring birefringent objects 5,6,7 or specific geometrical structurers [8][9][10][11] , and frequently they use more than one wavelength. In our technique, a monochromator delivers the light beam, wavelength of which can be scanned over the programmed spectrum in a quasi-continues manner.…”

Section: Introductionmentioning

confidence: 99%

Multispectral interferometry for characterizing nano-objects

Litwin,

Radziak,

Czyzewski

et al. 2024

Optics and Photonics for Advanced Dimensional Metrology III

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The paper discusses an alternative approach to the variable wavelength interferometry. The technique is based on specialized composition of two birefringent prisms that are inserted in a classical microscope with the Kӧhler illumination system. The optical system includes a continuously tuned light source and consists in advanced processing of sequentially recorded images at different wavelengths. The instrument is suitable for both transmitted and reflected-light modes and allows the user to measure optical and geometrical parameters of phase or reflective structures. This paper focuses on the reflected-light mode set-up, and measurements of waveplates and step height standards. The low uncertainty of the optical path difference is obtained by the continuous character of the light source and constitutes a key element of the system. In contrast to some previous presentations on the variable wavelength interferometry this paper demonstrates more profound nature of the phenomenon and a more precise algorithm for the fringe image processing.

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Section: Introductionmentioning

confidence: 99%

Multispectral interferometry for characterizing nano-objects

Litwin,

Radziak,

Czyzewski

et al. 2024

Optics and Photonics for Advanced Dimensional Metrology III

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“…В [7][8][9] приводится способ для восстановления абсолютных значений измеряемой величины интерференционными методами. Этот метод с использованием модульной арифметики получил название G-S-алгоритм [10][11][12][13]. Поэтому развитие данных методов играет важную роль не только для компьютерных технологий, но и для ряда инженерных задач.…”

Section: Introductionunclassified

Comparison of numbers and analysis of overflow in modular arithmetic

Guzhov¹,

Marchenko²,

Trubilina³

et al. 2021

Analysis and data processing systems

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The method of modular arithmetic consists in operating not with a number, but with its remainders after division by some integers. In the modular number system or the number system in the residual classes, a multi-bit integer in the positional number system is represented as a sequence of several positional numbers. These numbers are the remainders (residues) of dividing the original number into some modules that are mutually prime integers. The advantage of the modular representation is that it is very simple to perform addition, subtraction and multiplication operations. In parallel execution of operations, the use of modular arithmetic can significantly reduce the computation time. However, there are drawbacks to modular representation that limit its use. These include a slow conversion of numbers from modular to positional representation; the complexity of comparing numbers in modular representation; the difficulty in performing the division operation; and the difficulty of determining the presence of an overflow. The use of modular arithmetic is justified if there are fast algorithms for calculating a number from a set of remainders. This article describes a fast algorithm for converting numbers from modular representation to positional representation based on a geometric approach. The review is carried out for the case of a comparison system with two modules. It is also shown that as a result of increasing numbers in positional calculus, they successively change in a spiral on the surface of a two-dimensional torus. Based on this approach, a fast algorithm for comparing numbers and an algorithm for detecting an overflow during addition and multiplication of numbers in modular representation were developed. Consideration for the multidimensional case is possible when analyzing a multidimensional torus and studying the behavior of the turns on its surface.

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“…Wengierow et al (2008) developed the multiple-wavelength interferometer based on Twyman-Green interferometer with automatic data analysis based on phase fraction method and later the automatic fringe pattern analysis method was modified. Wengierow et al (2013) further developed the above automatic multiple-wavelength interferometer system with extended measurement range for calibration of long gauge block up to 1 m.…”

Section: Introductionmentioning

confidence: 99%

Length Measurement of Long Gauge Blocks by Interferometer

Kohmun

Limsuwan

Ranusawud³

et al. 2020

American Journal of Applied Sciences

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A gauge block interferometer with a vacuum chamber was designed and constructed for the measurement of gauge block lengths between 10 to 1,000 mm. In the chamber, four gauge blocks under the length measurement can be mounted on the measuring table. Furthermore, the length of all four gauge blocks can be measured continuously in one measurement. In this study, four gauge blocks with the nominal length of 125, 200, 400 and 500 mm were used for the length measurement. The environment parameters in the vacuum chamber including temperature, pressure, relative humidity and CO2 concentration were measured. The refractive index of air which depends on environment parameters was determined by using updated Edlén equation. Then, the lengths of four gauge blocks were measured and found to be 125.00025, 200.00019, 400.00070 and 500.00064, respectively.

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Measurement System Based on Multi-Wavelength Interferometry for Long Gauge Block Calibration

Cited by 9 publications

References 13 publications

Multispectral interferometry for characterizing nano-objects

Multispectral interferometry for characterizing nano-objects

Comparison of numbers and analysis of overflow in modular arithmetic

Length Measurement of Long Gauge Blocks by Interferometer

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