Measurement of voltage and current in continuous and pulsed rf and dc glow discharges

Hoffmann, Volker; Efimova, Varvara; Voronov, M.; Šmı́d, Petr; Steers, Edward B. M.; Eckert, John A.

doi:10.1088/1742-6596/133/1/012017

Cited by 27 publications

(25 citation statements)

References 23 publications

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“…The plasma behaves electrically rather similar to a resistance [11]. The work function which has inverse relation with secondary electron coefficient.…”

Section: Resultsmentioning

confidence: 99%

Electrical glow discharges and plasma parameter of planar sputtering system for silver target

Hasan¹

2018

IJP

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DC planar sputtering system is characterized by varying discharge potential of (250-2000 volt) and Argon gas pressures of (3.5×10-2 – 1.5) mbar. The breakdown voltage for silver electrode was studied with a uniform electric field at different discharge distances, as well as plasma parameters. The breakdown voltage is a product of the Argon gas pressure inside the chamber and gab distance between the electrodes, represent as Paschen curve. The Current-voltage characteristics curves indicate that the electrical discharge plasma is working in the abnormal glow region. Plasma parameters were found from the current-voltage characteristics of a single probe positioned at the inter-cathode space. Typical values of the electron temperature and the electron density are in the range of (2.93 –5.3) eV and (10-16 -10-17) m-3 respectively.

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“…The plasma behaves electrically rather similar to a resistance [11]. The work function which has inverse relation with secondary electron coefficient.…”

Section: Resultsmentioning

confidence: 99%

Electrical glow discharges and plasma parameter of planar sputtering system for silver target

Hasan¹

2018

IJP

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“…Apparently, the THz pulse may relate to THz radiation, the THz radiation power may be approximately estimated as 10 −21 W by using

P = 40 π^{2} I_{0}^{2} {(1 true/ λ)}^{2}

, here, I 0 ≈ 10 −7 A is the amplitude of the current, λ ≈ 10 −4 m is the wavelength of the THz radiation, and l ≈ 1 nm is taken as the length of the BGF. On the one hand, it is noted that the current measurement is an integral in time on the microsecond scale , the proposed current oscillation perhaps can not be detected directly. Detecting the THz radiation may be used to indirectly test the existence of the THz pulse.…”

Section: Numerical Calculations and Discussionmentioning

confidence: 94%

A bilayer-graphene-flake-based terahertz switch

Chen

Wang

Tao

et al. 2013

Phys. Status Solidi B

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In this work, we shall demonstrate theoretically that, for certain energy ranges, the electron‐transport properties of a bilayer‐graphene‐flake (BGF)‐based system may be strongly modified by small variations of the interlayer spacing. On the other hand, the interlayer spacing variation may be yielded by a vibrational mode in the terahertz region. Thus, a BGF‐based terahertz switch is proposed. Potential applications include terahertz pulse generators, digital electronics, and logic devices.

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“…papers have been published on the analytical applications of the pulsed GD-OES. 6,7) In the depth profiling of GD-OES, not only the interface resolution but the information depth should be taken into consideration. The interface resolution would be determined principally by the shape of the sputter crater left when the sputtering passes through two different layers in the sample, where a rectangular-shape crater is desirable to obtain better interface resolution.…”

Section: Application Of Dual-step Pulse Voltage To the Excitation Soumentioning

confidence: 99%

Application of Dual-step Pulse Voltage to the Excitation Source for Improving the Depth Profiling in Glow Discharge Optical Emission Spectrometry

Miura

Wagatsuma

2018

ISIJ Int.

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Measurement of voltage and current in continuous and pulsed rf and dc glow discharges

Cited by 27 publications

References 23 publications

Electrical glow discharges and plasma parameter of planar sputtering system for silver target

Electrical glow discharges and plasma parameter of planar sputtering system for silver target

A bilayer-graphene-flake-based terahertz switch

Application of Dual-step Pulse Voltage to the Excitation Source for Improving the Depth Profiling in Glow Discharge Optical Emission Spectrometry

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