Abstract:Determining the Young’s modulus accurately is important in micro-electro-mechanical systems (MEMS) design. Generally, the Young’s modulus of a micro-component is measured by the resonance method, of which the actuation is electrostatic force. However, this method does not take the effect of the electrostatic force on the resonant frequency into consideration. Thus, the test error becomes more obvious as the DC voltage increases. In this paper, an improved resonance method, determining the Young’s modulus of a … Show more
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