Measurement of static and vibration-induced phase noise in UHF thin film resonator (TFR) filters

Birdsall, S.A.; Dever, P.B.; Donovan, Joseph B.; Driscoll, M.M.; Lakin, K.M.; Pham, Thi Dao

doi:10.1109/freq.2001.956363

Cited by 3 publications

(2 citation statements)

References 5 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In another study [64], static phase noise and vibration sensitivity of a thin-film resonator (TFR) filter operating at frequencies of 640 and 2110 MHz were measured. [65] this study provides an accurate simulation of phase noise in voltage control generator (VCO) circuits using numerical solutions of equations to calculate the capacitance of a MEMS capacitor.…”

Section: Other Noise Sourcesmentioning

confidence: 99%

The Mechanical Effects Influencing on the Design of RF MEMS Switches

et al. 2020

View full text Add to dashboard Cite

Radio-frequency switches manufactured by microelectromechanical systems technology are now widely used in aerospace systems and other mobile installations for various purposes. In these operating conditions, these devices are often exposed to intense mechanical environmental influences that have a strong impact on their operation. These negative effects can lead to unwanted short-circuit or open-circuit in the radio-frequency transmission line or to irreversible damage to structural elements. Such a violation in the operation of radio-frequency microelectromechanical switches leads to errors and improper functioning of the electronic equipment in which they are integrated. Thus, this review is devoted to the analysis of the origin of these negative intense mechanical effects of the environment, their classification, and analysis, as well as a review of methods to reduce or prevent their negative impact on the design of radio-frequency microelectromechanical switches.

show abstract

Section: Other Noise Sourcesmentioning

confidence: 99%

The Mechanical Effects Influencing on the Design of RF MEMS Switches

et al. 2020

View full text Add to dashboard Cite

show abstract

“…Conventionally, these devices are produced by depositing the oxides across the entire device, then patterning with photolithography, and finally etching away the parts unneeded. Common deposition techniques often require expensive infrastructure, toxic gaseous precursors, or high‐vacuum, and include molecular beam epitaxy, RF sputtering, metalorganic vapor phase epitaxy, and chemical vapor deposition …”

Section: Introductionmentioning

confidence: 99%

Solution Deposition of Micropatterned Nanocrystalline Metal Oxide Films Through Hydrogels

Tredici

Yaghmaie

Irving

et al. 2011

Journal of the American Ceramic Society

View full text Add to dashboard Cite

A new solution method based on inexpensive hydrogels and inorganic salts is applied to the synthesis of micropatterned ceramic oxide thin films. Poly(ethylene glycol)-based polymeric precursors, loaded with simple metal precursors, are photopolymerized and micropatterned through soft-lithographic techniques. After thermal degradation, ceramic oxide thin films are produced. The process, examined by means of thermal analysis, grazing incidence diffraction, atomic force microscopy and profilometry, leads to homogeneous nanostructured films, and exhibits great lithographic reliability, remarkably avoiding lateral shrinkage and background residual layer. The method, which permits to overcome some drawbacks related to conventional soft-lithographic and polymer-assisted deposition techniques, was applied to a large number of simple and complex oxides.

show abstract

Wireless temperature sensing using a passive RFID tag with film bulk acoustic resonator

Lin

Kao

2008

2008 IEEE Ultrasonics Symposium

View full text Add to dashboard Cite

The lifetime of active RFID tag is limited by the equipped battery capacity. A passive RFID tag which gathers power via inductive coupling from RF power for temperature sensing was proposed to extend the lifetime of the tag. An oscillator with film bulk acoustic resonator (FBAR) lies at the heart of the tag. A four-layered FBAR with Al/AlN/SiN X /Au composite structure was fabricated. The oscillation frequency of the oscillator varies with the temperature linearly. The temperature can be detected easily by measuring the shift of oscillation frequency. The measured phase noise of the oscillator is -75dBc/Hz at 10 kHz offset. A linear temperature sensitivity of -34.5 ppm/ o C in the temperature range from 10 and 80 o C at 2.48 GHz is achieved.

show abstract

Measurement of static and vibration-induced phase noise in UHF thin film resonator (TFR) filters

Cited by 3 publications

References 5 publications

The Mechanical Effects Influencing on the Design of RF MEMS Switches

The Mechanical Effects Influencing on the Design of RF MEMS Switches

Solution Deposition of Micropatterned Nanocrystalline Metal Oxide Films Through Hydrogels

Wireless temperature sensing using a passive RFID tag with film bulk acoustic resonator

Contact Info

Product

Resources

About