2000
DOI: 10.1103/physrevlett.85.349
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Measurement of Roughness of Two Interfaces of a Dielectric Film by Scattering Ellipsometry

Abstract: The polarization of light scattered by oxide films thermally grown on photolithographically generated microrough silicon surfaces was measured as functions of scattering angle. Using the predictions of first-order vector perturbation theory for scattering from interfacial roughness to interpret the results, the roughness of each interface and the correlation function between the two interfaces can be determined. The results show the spatial frequency dependence of the SiO (2)/Si interface smoothening.

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Cited by 31 publications
(20 citation statements)
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References 30 publications
(33 reference statements)
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“…Variations in the thickness of surface oxides (e.g. the iron and/or chromium oxides in this study) may cause additional deviations [8]- [11], [17,20,40], if they should be present at elevated temperatures and atmospheric conditions of interest. Furthermore, the sample and the reference are assumed to be similar in mass and composition.…”
Section: Consequences For Optical Heatingmentioning
confidence: 93%
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“…Variations in the thickness of surface oxides (e.g. the iron and/or chromium oxides in this study) may cause additional deviations [8]- [11], [17,20,40], if they should be present at elevated temperatures and atmospheric conditions of interest. Furthermore, the sample and the reference are assumed to be similar in mass and composition.…”
Section: Consequences For Optical Heatingmentioning
confidence: 93%
“…Systematic investigation of reflection and scattering [32] have been performed for sinusoidal-shaped surface morphologies [24], other well-defined geometries [11,15,16,17,23,33] and sub-surface defects [21,34]. Simplified models exist also for special cases, where the optical wavelength is much smaller (or much larger) than the in-plane periodicity of a surface pattern [35].…”
Section: Reflection and Scattering Measurementsmentioning
confidence: 99%
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“…Polarized light scattering has been shown to enable the distinction amongst numerous scattering mechanisms in a number of other systems. [5][6][7][8][9][10][11] In many cases, the scattering function is a product of two factors, one of which is dependent upon the source of the scattering, which also determines its polarization properties, and another, which depends upon the statistical description of the ensemble of scatterers and which primarily affects only the intensity distribution. This separation of the scattering function into two functions is analogous to the use of form factors and structure factors, respectively, in x-ray scattering.…”
Section: Introductionmentioning
confidence: 99%
“…In each of these examples a small change in the distribution of heights, widths, or curvatures of the peaks has an important effect on the rough surface's behavior (Kim et al, 2006). Light scattering from optical coatings is the best example for how strongly processes could be affected by the roughness of interfaces (Germer, 2000). However, in spite of the great influence of surface roughness on system behavior its measurement is still a notable problem of Metrology (Villarubia, 2005;Van Gorp et al, 2007).…”
Section: Complexity Criticality and Roughnessmentioning
confidence: 99%