2008
DOI: 10.1016/j.jallcom.2006.02.109
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Measurement of residual stress of PZT thin film on Si(100) by synchrotron X-ray rocking curve technique

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Cited by 16 publications
(10 citation statements)
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“…Among various buffer layer materials, metallic perovskitetype oxides, such as La 0.5 Sr 0.5 CoO 3 (LSCO) [6], LaNiO 3 (LNO) [7], YBa 2 Cu 3 O 7−ı (YBCO) [8], and SrRuO 3 (SRO) [9], have been used as the epitaxial template for the growth of ferroelectric films and bottom electrodes. For the selection of bottom electrodes, pseudocubic LNO, with a lattice parameter of 0.384 nm, is a conductive oxide that shows promise.…”
Section: Introductionmentioning
confidence: 99%
“…Among various buffer layer materials, metallic perovskitetype oxides, such as La 0.5 Sr 0.5 CoO 3 (LSCO) [6], LaNiO 3 (LNO) [7], YBa 2 Cu 3 O 7−ı (YBCO) [8], and SrRuO 3 (SRO) [9], have been used as the epitaxial template for the growth of ferroelectric films and bottom electrodes. For the selection of bottom electrodes, pseudocubic LNO, with a lattice parameter of 0.384 nm, is a conductive oxide that shows promise.…”
Section: Introductionmentioning
confidence: 99%
“…Pb(Zr 1−x Ti x )O 3 (PZT) thin film has been widely used in many applications, such as actuators, sensors, and microelectromechanical systems (MEMS), because of its giant piezoelectric [1][2][3]. The PZT phase diagram extensively accepted was proposed by Jaffe et al [4] in 1971.…”
Section: Introductionmentioning
confidence: 99%
“…There are a lot of numerical, analytical and experimental works on this subject [19][20][21]. Thermal stress analysis of YSZ insulation on Cu/MgB 2 wire was analytically investigated as a function of YSZ coating thickness.…”
Section: Resultsmentioning
confidence: 99%