Measurement of residual stress in DLC films prepared by plasma-based ion implantation and deposition

Oka, Yoshihiro; Kirinuki, Michiharu; Nishimura, Yoshimi; Azuma, Kingo; Fujiwara, Etsuo; Yatsuzuka, Mitsuyasu

doi:10.1016/j.surfcoat.2004.04.010

Cited by 52 publications

(19 citation statements)

References 11 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The deposition rate using C 7 H 8 is higher than that using C 2 H 2 . Similar results are reported in the literature [8]. In the mixture of C 2 H 2 + C 7 H 8 , the deposition rate is close to that of C 7 H 8 only in spite of the large flow rate of C 2 H 2 in comparison with C 7 H 8 (C 2 H 2 : C 7 H 8 = 10 : 3).…”

Section: Contributedsupporting

confidence: 91%

“…In the PBII and other low-pressure plasma processes, hydrocarbon source gases, such as methane (CH 4 ) [5,6,11,12], acetylene (C 2 H 2 ) [6-9, 11], toluene (C 7 H 8 ) [3][4][5][8][9][10] and others [11], are usually employed to the deposition of DLC films. In addition, a mixture of them is used sometimes [5,9].…”

mentioning

confidence: 99%

“…In addition, a mixture of them is used sometimes [5,9]. It is reported [8,12] that the deposition rate of DLC films is affected by a kind of source gases. Relatively uniform and thick films are obtained in the case of C 7 H 8 use [10].…”

mentioning

confidence: 99%

See 2 more Smart Citations

Microstructure of diamond‐like carbon films prepared using acetylene and toluene by bipolar‐type plasma based ion implantation

Nakao

Choi

Kato

2008

Phys. Status Solidi (c)

View full text Add to dashboard Cite

Diamond‐like carbon (DLC) films are deposited on Si substrates using acetylene (C2H2), toluene (C7H8) and their mixed gas, and the microstructures are examined by micro‐Raman spectroscopy, Rutherford backscattering spectrometry (RBS) and elastic recoil detection (ERD) analysis as a function of negatively pulsed voltages (Vn). It is found that the formation of graphite‐like structure (aromatic ring clustering) is enhanced with increasing Vn. In addition, the density of the films is increased up to approximately 2.0 g/cm3 and the H concentration is decreased with increasing Vn. The use of C2H2 has much effect on the formation of graphite‐like structure and the reduction of H concentration in the films at high Vn as compared with others. The deposition rate of the films is increased with increasing Vn. Relatively high deposition rate is obtained when using C7H8. In the case of the mixed gas, the deposition rate is found to be close to that of C7H8. These results suggest that C7H8 is dominant to the deposition process when using the mixture of C2H2 + C7H8. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

show abstract

Section: Contributedsupporting

confidence: 91%

mentioning

confidence: 99%

See 1 more Smart Citation

Microstructure of diamond‐like carbon films prepared using acetylene and toluene by bipolar‐type plasma based ion implantation

Nakao

Choi

Kato

2008

Phys. Status Solidi (c)

View full text Add to dashboard Cite

show abstract

“…These stresses are known to vary as a function of the bias voltage [5,6], power density [7,8], and gas precursor [5]. Modern techniques allow for the deposition of multi-layer or gradient coatings, as well as doping or alloying of a DLC coating, and these are used to reduce internal stresses or to achieve some extra functionality.…”

Section: Introductionmentioning

confidence: 99%

The friction of diamond-like carbon coatings in a water environment

et al. 2013

View full text Add to dashboard Cite

Diamond-like carbon (DLC) coatings are known to provide beneficial mechanical and tribological properties in harsh environments. Their combination of high wear resistance and low friction has led to their extensive use in any number of industries. The tribological performance of a DLC coating is varied however, and the frictional response is known to be strongly dependent on the surrounding environment, as well as the material composition and bonding structure of the DLC coating. This paper presents an up-to-date review on the friction of DLC coatings in a water environment, with a special focus on transfer layer formation and tribochemistry.

show abstract

“…DLC is a metastable amorphous carbon with excellent tribological and mechanical properties [1] that make it well suited for the hot embossing process. However, high internal stress, poor adhesion to substrates, and limited coating thickness have prevented the use of DLC in certain applications [2,3]. In addition, the beginning of graphitization (i.e., sp 3 to sp 2 transformation) at high temperatures [4] renders DLC unsuitable for coating molds under elevated temperature conditions.…”

Section: Introductionmentioning

confidence: 99%

Evaluation of Friction Coefficient and Adhesion Properties of Silicon Carbon Nitride Films Prepared by HWCVD

Yamada

Iseda

Kadotani³

et al. 2017

Acta Phys. Pol. A

View full text Add to dashboard Cite

We have investigated the friction-coefficient properties of silicon carbon nitride (SiCN) films deposited on stainless steel substrates and the adhesion properties of SiCN films deposited on Si(100). The SiCN films were deposited by hot-wire chemical vapor deposition using hexamethyldisilazane and ammonium. It was found that SiCN coating was able to effectively reduce the frictional coefficient of the stainless steel substrates. The adhesion strength was measured by surface-interface physical property analysis equipment (SAICAS) and was found to be 45 N/m for the as-deposited SiCN film on Si(100). Furthermore, a maximum adhesive strength of 92 N/m was obtained after treating the film for 10 min at 1000• C.

show abstract

Measurement of residual stress in DLC films prepared by plasma-based ion implantation and deposition

Cited by 52 publications

References 11 publications

Microstructure of diamond‐like carbon films prepared using acetylene and toluene by bipolar‐type plasma based ion implantation

Microstructure of diamond‐like carbon films prepared using acetylene and toluene by bipolar‐type plasma based ion implantation

The friction of diamond-like carbon coatings in a water environment

Evaluation of Friction Coefficient and Adhesion Properties of Silicon Carbon Nitride Films Prepared by HWCVD

Contact Info

Product

Resources

About