2013
DOI: 10.4028/www.scientific.net/amm.284-287.488
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Measurement of Radius of Curvature by Coordinate Measurement Machine

Abstract: Radius of curvature is one of the key parameters of optical components. A variety of methods have been developed for this measurement. This paper describes a novel way, named “CMM spherometry by probe compensation”, to measure the radius of curvature of optical surfaces by coordinate measuring machine (CMM). The measurement combines CMM measurement and iteration calculation scheme is presented. The measurement results of CMM and the trace samples are compared. The effect of temperature compensation is discusse… Show more

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Cited by 3 publications
(3 citation statements)
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“…Inspection of the components is currently being performed. Such inspection consists of measuring dimensional and shape accuracy, mostly by means of conventional measurement methods -for example by contact method using coordinate-measuring machine [1]. Although such measurement is very accurate, it offers only constrained amount of discrete information, usually limited to measurement and comparison of prescribed dimensions and tolerances of shape and position according to the drawing.…”
Section: Introductionmentioning
confidence: 99%
“…Inspection of the components is currently being performed. Such inspection consists of measuring dimensional and shape accuracy, mostly by means of conventional measurement methods -for example by contact method using coordinate-measuring machine [1]. Although such measurement is very accurate, it offers only constrained amount of discrete information, usually limited to measurement and comparison of prescribed dimensions and tolerances of shape and position according to the drawing.…”
Section: Introductionmentioning
confidence: 99%
“…Thus, decenter and tilt relative to the main plate were also analyzed using the macro developed by the optical design software. 12 The M1 alignment procedure is shown in Fig. 5.…”
Section: Procedures For Aligning the Primary Mirror And Bipod Flexure mentioning
confidence: 99%
“…This method adopts the frequency of peaks and valleys of each fringe Zernike coefficient grabbed by the measurement with various orientations in a horizontal optical-axis configuration to separate the nonrotationally symmetric aberration of the mirror. 12 Based on the characteristics of each fringe Zernike term, the aberration from the residual form error after manufacturing was obtained before the bipod flexure bonding process. During the bench test, after the bipod flexure was bonded to the primary mirror, only form errors caused by manufacturing with mounting effects rotated as the mirror rotated, but the gravity effect and intrinsic systematic error did not.…”
Section: Optical Test With Wavefront Sensormentioning
confidence: 99%