Measurement of plasma parameters in an inductively coupled plasma reactor

Sasaki, Hiroshi; Nanbu, Kenichi; Takahashi, Masayoshi

doi:10.1063/1.1407571

Cited by 3 publications

(3 citation statements)

References 4 publications

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“…To achieve control or simulation of plasma processing units, diagnosis of ICP by OES measurement is required. Sasaki et al [21] reported T e and N e of the 0.5-2.0 Pa Ar ICP by Langmuir probe measurement. Younus and Rehman [22] reported T e , N e , and EEDF of Ar-N 2 magnetic pole enhanced ICP by probe and OES measurement of nine emission lines from 687 to 842 nm based on the calculation of the rate coefficient.…”

mentioning

confidence: 99%

Optical Emission Spectroscopic Measurement of Argon Low-Pressure Inductively Coupled Plasma Based on the Optimization Algorithm of Plasma Diagnostic Model

Yamashita

Akiba

Iwanaga

et al. 2022

IEEE Trans. Plasma Sci.

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Previously, we reported an optimization algorithm based on a plasma diagnostic model for optical emission spectroscopic (OES) measurements. In this study, we improved the algorithm. In the improved algorithm, the dependence of unimodality of reduced population density on electron temperature, electron density, and electron energy distribution function (EEDF) was discussed. Furthermore, electron temperature, electron density, and EEDF of 10 Pa argon inductively coupled plasma were diagnosed to experimentally evaluate the proposed algorithm. The diagnosis results were compared with those of the line-pair method and excitation temperature conversion method. The reduced population density distribution, which was calculated under the condition of the result of the proposed method, was in good agreement with the experimental result by OES measurement, thereby demonstrating the reliability of our proposed method.

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confidence: 99%

Optical Emission Spectroscopic Measurement of Argon Low-Pressure Inductively Coupled Plasma Based on the Optimization Algorithm of Plasma Diagnostic Model

Yamashita

Akiba

Iwanaga

et al. 2022

IEEE Trans. Plasma Sci.

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“…These parameters were defined using examples from. [30][31][32] Type of plasma of experimental error, it is preferable to reduce the error in the diagnostic model. The dependence of n i /g i on T e and N e was a monotonic function for both the ICP and the MWD (Figs.…”

Section: Discussionmentioning

confidence: 99%

Developing an optimization algorithm for diagnostic modeling of optical emission spectroscopic measurement of non-equilibrium plasmas based on the argon collisional-radiative model

Yamashita

Akiba

Iwanaga

et al. 2021

Jpn. J. Appl. Phys.

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In this work, an optimization algorithm was proposed for plasma diagnostic modeling based on a statistical analysis of reduced population density distribution. The algorithm generates a diagnostic equation, whose input parameters are the radiant flux of the multi-optical emission lines, and output parameters are electron temperature T e, electron density N e, and electron energy distribution function (EEDF), based on the dependence of reduced population density onT e, N e, and EEDF. The argon collisional-radiative model and the generalized EEDF were applied for the analysis of the excitation-kinetics. In this study, the diagnostic error for the low-pressure inductively coupled plasma, the low-pressure microwave discharge surface wave plasma, and the atmospheric dielectric barrier discharge plasma were simulated. The simulated diagnostic errors were smaller than those of the previously reported model.

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“…Karakas [18] suggested that the temperatures of charged and neutral species in inductively coupled plasma (ICP) are important for studying the basic physical reactions of plasma chemistry. Sasaki et al [19] noted that the non-uniformity of plasma parameters in the axial space depends mainly on the distance between the plasma source and the measurement position. Li et al [20] discussed the distribution of the electron temperatures of different axial and radial positions.…”

Section: Introductionmentioning

confidence: 99%

The Effect of Plasma Electron Temperature on the Surface Properties of Super-Hydrophobic Cotton Fabrics

Lai

Liu

et al. 2020

Coatings

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The existing coating systems used for the preparation of super-hydrophobic surfaces are facing new challenges because the use of organic solvents and long-carbon-chain organic fluorine monomers is banned. In this article, the authors have proven that by using inductively coupled plasma-enhanced chemical vapor deposition (PECVD) with argon (Ar), which is a completely dry process, lauryl methacrylate (LMA) can produce a stable super-hydrophobic coating effect. The effect of electron temperature on the super-hydrophobicity of cotton fabrics is investigated in terms of water repellency, chemical composition, and surface morphology. It is found that the improvement in the hydrophobicity of cotton fabric is attributed to the deposition of alkyl and ester groups, and the formation of a micro-nano-structure on the surface of the fabric after plasma treatment. The electron temperature plays an important role in achieving the super-hydrophobicity of cotton fabrics. The plasma-enhanced coating may offer a safe and dry super-hydrophobic technique with diverse applications.

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Measurement of plasma parameters in an inductively coupled plasma reactor

Cited by 3 publications

References 4 publications

Optical Emission Spectroscopic Measurement of Argon Low-Pressure Inductively Coupled Plasma Based on the Optimization Algorithm of Plasma Diagnostic Model

Optical Emission Spectroscopic Measurement of Argon Low-Pressure Inductively Coupled Plasma Based on the Optimization Algorithm of Plasma Diagnostic Model

Developing an optimization algorithm for diagnostic modeling of optical emission spectroscopic measurement of non-equilibrium plasmas based on the argon collisional-radiative model

The Effect of Plasma Electron Temperature on the Surface Properties of Super-Hydrophobic Cotton Fabrics

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