Measurement of nanoscale displacements using a Mirau white-light interference microscope and an inclined flat surface

Phan, Nhue Nguyen; Le, Hai Hoang; Duong, Dung Chi; Ta, Van Duong

doi:10.1117/1.oe.58.6.064106

Cited by 7 publications

(2 citation statements)

References 19 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Interferometers are widely used in industry for the measurement of shape and deformation on engineering samples with size ranging from millimetre to micro or nanometre. Interferometer, by incorporating different techniques, can be used to inspect both optically smooth and rough surfaces in wide range of sizes [22][23][24]. The optical inspection can be done under static, quasi-static or dynamic conditions [25][26][27].…”

Section: Theoritical Backgound For Measurement Of Shape Using Two Wavelengthsmentioning

confidence: 99%

Simultaneous profiling of optically smooth and rough surfaces using dual-wavelength interferometry

Rajendran

Pramanik

2020

Quantitative Phase Imaging VI

View full text Add to dashboard Cite

Interferometers are widely used in industry for surface profiling of microsystems. It can be used to inspect both smooth (reflective) and rough (scattering) surfaces in wide range of sizes. If the object surface is smooth, the interference between reference and object beam results in visible fringes. If the object surface is optically rough, the interference between reference and object beam results in speckles. Typical microsystems such as MEMS consist of both smooth and rough surfaces on a single platform. Recovering the surface profile of such samples with single-wavelength is not straight forward. In this paper, we will discuss a dual-wavelength approach to measure surface profile of both smooth and rough surfaces simultaneously. Interference fringe pattern generated on a combined surface is acquired at two different wavelengths. The wrapped phases at each wavelength are calculated and subtracted to generate contour phase map. This subtraction reveals the contour fringes of rough and smooth surfaces simultaneously. The dual-wavelength contour measurement procedure and experimental results will be presented.

show abstract

Section: Theoritical Backgound For Measurement Of Shape Using Two Wavelengthsmentioning

confidence: 99%

Simultaneous profiling of optically smooth and rough surfaces using dual-wavelength interferometry

Rajendran

Pramanik

2020

Quantitative Phase Imaging VI

View full text Add to dashboard Cite

show abstract

“…They considered the dispersion change caused by the tilting of the splitter plate, but did not consider the thickness difference between the two plates. Nevertheless, previous studies have not carefully considered the variation of the dispersion introduced by asymmetric beam splitter when the reference mirror is tilted [14][15][16] .…”

Section: Introductionmentioning

confidence: 99%

Influence of reference mirror tilting on the performances of a Michelson-type interference-microscope objective

Wu,

He,

Wang

2024

Sixth Conference on Frontiers in Optical Imaging and Technology: Novel Imaging Systems

View full text Add to dashboard Cite

Asymmetric spectroscopic prism of a Michelson white-light interference- microscope objective introduces additional dispersion. The tilt of a reference mirror influences the dispersion and measurement accuracy of a white-light interference-based 3D reconstruction system. In this paper, we first numerically analyzed the performances of a Michelson-type interference-microscope objective by measuring a step structure at different tilt angles of the reference mirror. It showed that the height measurement errors were within the range of ±15nm when the tilt angles were 0°, 0.13°, 0.26°, 0.39° and 0.52 ° , respectively. Finally, a self-designed 5 × interference-microscope objective was used in the white-light 3D measurement system to experimentally demonstrate the influence of reference mirror tilting on the measurement. Both experimental and simulated results are in good agreement, showing that the tilt angle of the reference mirror in a 5× Michelson interference-microscope objective should be less than 0.39° while maintaining a measurement error less than ±15nm. We believe our results can provide a theoretical study for the assembly of reference mirror in a Michelson interference-microscope objective.

show abstract

An Accelerated Algorithm for 3D Reconstruction of Groove Structure Based on Parallel Light and White Light Interference

Zhang

Liang

2021

2021 International Conference of Optical Imaging and Measurement (ICOIM)

View full text Add to dashboard Cite

Measurement of nanoscale displacements using a Mirau white-light interference microscope and an inclined flat surface

Cited by 7 publications

References 19 publications

Simultaneous profiling of optically smooth and rough surfaces using dual-wavelength interferometry

Simultaneous profiling of optically smooth and rough surfaces using dual-wavelength interferometry

Influence of reference mirror tilting on the performances of a Michelson-type interference-microscope objective

An Accelerated Algorithm for 3D Reconstruction of Groove Structure Based on Parallel Light and White Light Interference

Contact Info

Product

Resources

About