2006
DOI: 10.1016/j.precisioneng.2005.06.003
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Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage

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Cited by 111 publications
(56 citation statements)
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References 26 publications
(25 reference statements)
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“…Measurement scroll radius can be obtained by outputs of probe encoder and X axis encoder. Profile error can be described by the following equation (4). mea th error r r r − = (4) Where, r error is involute profile error, r th is theoretical scroll polar radius; r mea is measurement scroll polar radius.…”
Section: Measurement System and Measurement Methodsmentioning
confidence: 99%
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“…Measurement scroll radius can be obtained by outputs of probe encoder and X axis encoder. Profile error can be described by the following equation (4). mea th error r r r − = (4) Where, r error is involute profile error, r th is theoretical scroll polar radius; r mea is measurement scroll polar radius.…”
Section: Measurement System and Measurement Methodsmentioning
confidence: 99%
“…Profile error can be described by the following equation (4). mea th error r r r − = (4) Where, r error is involute profile error, r th is theoretical scroll polar radius; r mea is measurement scroll polar radius. The same scroll sample was also measured for comparison by a commercial CMM, which was installed in a temperature controlled metrology room.…”
Section: Measurement System and Measurement Methodsmentioning
confidence: 99%
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“…3-PPU (three pairs of prismatic-universal-universal joints) PCMM (parallel coordinate measuring machine). (1) Base, (2) table, (3) steel belt, (4) reducer, (5) motor, (6) linear grating, (7) reading head, (8) beam, (9) linear guider, (10) rod, (11) universal joints, (12) slider, (13) moving platform, (14) measuring head, and (15) limit switch. (a) front view; (b) upward view.…”
Section: Measuring Principle Of 3-puu Pcmmmentioning
confidence: 99%
“…Figure 4 illustrates one slider working on the guide Over the years, numerous scholars have intensively studied the characteristics of the aforementioned geometric errors on precision machines and made many valuable contributions, especially in analysis and discussion of the relationship between the motion straightness errors and angular motion errors. Their conclusion can be summarized as follows [12][13][14][15][16][17]:…”
Section: Property Of Slider Motion Errors In Pcmmmentioning
confidence: 99%