Abstract:The present work reported the intrinsic mechanical behavior of vanadium dioxide (VO2) thin film deposited on a SiO2 substrate using a combination of nanoindentation tests and a theoretical model. The effect of phase transition on mechanical parameters was studied by adjusting the test temperature. A new model that can simultaneously extract the elastic modulus and hardness was derived by introducing a dimensional analysis. The results showed that the thin film exhibits a hardness of 9.43 GPa and a Young’s modu… Show more
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