Measurement of mean thickness of transparent samples using simultaneous phase shifting interferometry with four interferograms

Flores-Muñoz, V. H.; Toto-Arellano, Noel-Ivan; Serrano-García, David I.; García, A. Martínez; Rodríguez-Zurita, Gustavo; Lechuga, L. García

doi:10.1364/ao.55.004047

Cited by 31 publications

(7 citation statements)

References 39 publications

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“…Recently, there has also been a rapid development in quantitative phase imaging (QPI) techniques, which further allows the quantitative determination of morphological parameters, such as the thickness and refractive index, of the sample under test. One prevalent QPI technique is based on phase-shifting interferometry ( 9 , 10 ) or off-axis digital holography ( 11 , 12 ), in which the phase distribution can be retrieved from the interference pattern. However, despite their high accuracy and spatial resolution, these techniques remain prone to issues such as laser speckle noise and susceptibility to vibrations.…”

Section: Introductionmentioning

confidence: 99%

Single-shot deterministic complex amplitude imaging with a single-layer metalens

Li,

Wang,

Zhao

et al. 2024

Sci. Adv.

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Conventional imaging systems can only capture light intensity. Meanwhile, the lost phase information may be critical for a variety of applications such as label-free microscopy and optical metrology. Existing phase retrieval techniques typically require a bulky setup, multiframe measurements, or prior information of the target scene. Here, we proposed an extremely compact system for complex amplitude imaging, leveraging the extreme versatility of a single-layer metalens to generate spatially multiplexed and polarization phase–shifted point spread functions. Combining the metalens with a polarization camera, the system can simultaneously record four polarization shearing interference patterns along both in-plane directions, thus allowing the deterministic reconstruction of the complex amplitude light field in a single shot. Using an incoherent light-emitting diode as the illumination, we experimentally demonstrated speckle-noise–free complex amplitude imaging for both static and moving objects with tailored magnification ratio and field of view. The miniaturized and robust system may open the door for complex amplitude imaging in portable devices for point-of-care applications.

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Section: Introductionmentioning

confidence: 99%

Single-shot deterministic complex amplitude imaging with a single-layer metalens

Li,

Wang,

Zhao

et al. 2024

Sci. Adv.

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“…N.-I. Toto Arellano et al [22] coupled a rectangular Sagnac interferometer and two Michelson interferometers together to generate four phase-shifted holograms simultaneously. Their system needed a polarizer array before the camera to obtain phase shifts.…”

Section: Introductionmentioning

confidence: 99%

Synchronous Phase-Shifting Interference for High Precision Phase Imaging of Objects Using Common Optics

Zhao

Liu

Tianhe

et al. 2023

Sensors

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Quantitative phase imaging and measurement of surface topography and fluid dynamics for objects, especially for moving objects, is critical in various fields. Although effective, existing synchronous phase-shifting methods may introduce additional phase changes in the light field due to differences in optical paths or need specific optics to implement synchronous phase-shifting, such as the beamsplitter with additional anti-reflective coating and a micro-polarizer array. Therefore, we propose a synchronous phase-shifting method based on the Mach–Zehnder interferometer to tackle these issues in existing methods. The proposed method uses common optics to simultaneously acquire four phase-shifted digital holograms with equal optical paths for object and reference waves. Therefore, it can be used to reconstruct the phase distribution of static and dynamic objects with high precision and high resolution. In the experiment, the theoretical resolution of the proposed system was 1.064 µm while the actual resolution could achieve 1.381 µm, which was confirmed by measuring a phase-only resolution chart. Besides, the dynamic phase imaging of a moving standard object was completed to verify the proposed system’s effectiveness. The experimental results show that our proposed method is suitable and promising in dynamic phase imaging and measurement of moving objects using phase-shifting digital holography.

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“…Furthermore, by utilizing the white light scanning interferometry combined with reflectometry, the thickness and surface measurement of transparent thin-film layers was achieved, where the thickness and profile of the reflectometry and interferometry modes were separately determined [9]. The modified Sagnac interferometer in [10][11][12] were presented to measure a phase-shifting in real time by dividing the beam into testing and reference arms using a BS. However, various polarization stepping algorithms were described, but no conclusions have been reached as to which is the best.…”

Section: Introductionmentioning

confidence: 99%

The comparison of multi-stepping algorithms for real-time thickness measurement of transparent thin films using polarization settings

Usman¹,

Jiraraksopakun²,

Kaewon³

et al. 2022

Laser Phys.

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This paper presents the comparison of three-, four- and five-step techniques for measuring transparent thin-film thickness of T a 2 O 5 and W O 3 deposited on BK-7 substrates. The Sagnac interferometer was modified with phase shifting approach for the determination of thin-film thickness. The input light beam was split into reference and testing beams. Before the output light reaching the balanced photodetectors, the real-time signal detection was performed to obtain the output intensities of both beams using three-, four-, and five-polarization settings of an analyzer. The thicknesses could then be efficiently translated from the measured intensities. Thicknesses from three-, four- and five-stepping algorithms were compared with ones from the conventional FE-SEM measurement, and it was discovered that the former performed better with less errors. The findings show that the phase-shifting technique using three-polarization settings is more suitable for the thickness measurement of the transparent thin film.

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Measurement of mean thickness of transparent samples using simultaneous phase shifting interferometry with four interferograms

Cited by 31 publications

References 39 publications

Single-shot deterministic complex amplitude imaging with a single-layer metalens

Single-shot deterministic complex amplitude imaging with a single-layer metalens

Synchronous Phase-Shifting Interference for High Precision Phase Imaging of Objects Using Common Optics

The comparison of multi-stepping algorithms for real-time thickness measurement of transparent thin films using polarization settings

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