2013
DOI: 10.7567/jjap.52.091301
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Measurement of Ionization Energies of Nitrogen in 4H-SiC by Traveling-Wave Method

Abstract: The impurity bands and corresponding ionization energies of nitrogen atoms in a 4H-SiC crystal with a concentration of 1×1019 cm-3 are measured by a nondestructive and noncontact traveling-wave method. When a SiC sample was placed near the surface of a surface acoustic wave device, its conductivity can be obtained by measuring the attenuation of the piezo-potential traveling-wave grazing along the surface of the sample. Temperature-dependent conductivities corresponding to a freeze-out process of free carriers… Show more

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Cited by 3 publications
(4 citation statements)
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“…The average activation energy E A of the nitrogen impurity band for all chips studied of about 40 meV is somewhat lower than the range of values of the donor binding energy given for an isolated donor in the literature of 50 to 100 meV. [17][18][19][20] The reason is that the broadening of the impurity band due to the interacting donor wave functions causes an effective reduction of the donor binding energy which is proportional to the donor density to the power 1/3. 9, [27][28][29] Raman spectroscopy can explore the coupling between phonons and free electrons to extract electronic transport parameters.…”
Section: Resultsmentioning
confidence: 58%
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“…The average activation energy E A of the nitrogen impurity band for all chips studied of about 40 meV is somewhat lower than the range of values of the donor binding energy given for an isolated donor in the literature of 50 to 100 meV. [17][18][19][20] The reason is that the broadening of the impurity band due to the interacting donor wave functions causes an effective reduction of the donor binding energy which is proportional to the donor density to the power 1/3. 9, [27][28][29] Raman spectroscopy can explore the coupling between phonons and free electrons to extract electronic transport parameters.…”
Section: Resultsmentioning
confidence: 58%
“…The isolated nitrogen donor has a depth between 50 and 100 meV depending on the local site. [17][18][19][20] Thus, the onset of the saturation is about expected at about 600 K. The onset temperature of the intrinsic region in SiC is way above the highest temperature of 700 K where we performed experiments due to a band gap energy E CB -E VB ¼ 3 eV for 4H-SiC in the temperature range studied. 21 Thus, only the free carriers in the CB contribute to the electric transport up to 300 K, i.e., the temperature range covers almost solely the freeze-out region, which is the justification for using a one-band Drude model in such a scenario.…”
Section: Resultsmentioning
confidence: 91%
“…51,52 We also must point out that when Z L is much less than Z s the current passing through the sample is constant, and energy loss of the travelingwave is inversely proportional to conductivity of the sample. On the other hand, when Z L is much larger than Z s the electric field strength in the sample is constant, and the energy loss is proportional to conductivity of the sample.…”
Section: -5mentioning
confidence: 99%
“…S6 in Ref. 39) because of a larger number of typical nitrogen donors ionization at k and h sites at 120 and 60 meV [49], respectively, with increasing temperatures. This paves the way for space agencies to employ 4H SiC based integrated circuits to probe the surface of Venus, where the temperature is ≈730 K [21].…”
mentioning
confidence: 97%