1997
DOI: 10.1016/s0040-6090(97)00383-0
|View full text |Cite
|
Sign up to set email alerts
|

Measurement of internal stresses in CVD diamond films

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
16
0
1

Year Published

1999
1999
2021
2021

Publication Types

Select...
7

Relationship

0
7

Authors

Journals

citations
Cited by 29 publications
(17 citation statements)
references
References 4 publications
0
16
0
1
Order By: Relevance
“…Thus, differences in CVD growth conditions, resulting in a different rate of defect incorporation, should have a strong effect on the internal stress. The contribution of the thermal component resulting from the difference in the thermal expansion coefficient of diamond and the substrate material was found to be negligible [1,2]. The films studied in this work show grain sizes larger than 5 mm; therefore the phonon confinement effect due to the small particle size [3] can be neglected as well.…”
Section: Introductionmentioning
confidence: 74%
See 1 more Smart Citation
“…Thus, differences in CVD growth conditions, resulting in a different rate of defect incorporation, should have a strong effect on the internal stress. The contribution of the thermal component resulting from the difference in the thermal expansion coefficient of diamond and the substrate material was found to be negligible [1,2]. The films studied in this work show grain sizes larger than 5 mm; therefore the phonon confinement effect due to the small particle size [3] can be neglected as well.…”
Section: Introductionmentioning
confidence: 74%
“…However, internal stress inevitably present in CVD films leads to a broadening of the diamond peak and to a shift as compared to its position in unstressed crystals n 0 (about 1332.5 cm ± ±1 ) [1]. It is generally assumed that this shift Dn n À n 0 is linearly proportional to the applied stress s, i.e., Dn Àas, where a is the pressure coefficient [1,2]. s can in general be considered as a sum of compressive and tensile components, both of which can further contain different contributions.…”
Section: Introductionmentioning
confidence: 99%
“…In the theory, the impedance data of materials that have capacitive and resistive components, when represented in the Nyquist diagram [namely, the negative of the imaginary part‐Im Z in the y ‐axis and the real part, Re Z in the x ‐axis] each point corresponding to a different frequency, leads to a succession of semicircles in the high frequency region …”
Section: Resultsmentioning
confidence: 99%
“…The in-depth nature and distribution of different intermediate crystalline structures of diamond coatings on the titanium substrate were determined by changing the incidence angle (8). The coating quality was evaluated by a micro-Raman spectroscopy with the 514.5 nm line ofargon ion laser.The residual stress ofdiamond coating was estimated by the Raman line shift from 1332 ern:' for natural diamond (9). The adhesion strength ofdiamond coatings on Ti substrate was evaluated by a Rockwell indentation tester according to a biaxial stress model (10,11).…”
Section: Experimental Metbodsmentioning
confidence: 99%