Measurement of foil thickness in transmission electron microscopy

Pan, Zhenpeng; Davies, C. K. L.; Stevens, R. N.

doi:10.1007/bf00351314

Cited by 6 publications

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References 3 publications

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“…A separation distance (r) is measured to 41.9 nm. The specimen thickness is re-evaluated by the following equation (Pan et al 1994 ); where θ is tilting angle from EELS measurement condition. The measured specimen thickness from the carbon contamination is 108.1 nm.…”

Section: Resultsmentioning

confidence: 99%

Comparative study on the specimen thickness measurement using EELS and CBED methods

Heo

2020

Appl. Microsc.

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Two thickness measurement methods using an electron energy loss spectroscopy (EELS) and 10a convergent beam electron diffraction (CBED) were compared in an Fe-18Mn-0.7C alloy. The thin foil specimen was firstly tilted to satisfy 10a two-beam condition. Low loss spectra of EELS and CBED patterns were acquired in scanning transmission electron microscopy (STEM) and TEM-CBED modes under the two-beam condition. The log-ratio method was used for measuring the thin foil thickness. Kossel-Möllenstedt (K-M) fringe of the diffracted disk of austenite was analyzed to evaluate the thickness. The results prove the good coherency between both methods in the thickness range of 72 ~ 113 nm with a difference of less than 5%.

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Section: Resultsmentioning

confidence: 99%

Comparative study on the specimen thickness measurement using EELS and CBED methods

Heo

2020

Appl. Microsc.

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“…Reported methods for direct measurement of the TEM sample thickness by a trigonometric-tilt series [15] and contamination-spot separation [16] suffer from complexity and poor accuracy. Convergent beam electron diffraction offers improved accuracy [17,18], but is a very localized measurement, limited to crystalline materials, and susceptible to beam damage [19].…”

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confidence: 99%