Measurement of Diffraction Efficiency for Diffractive Optical Elements

Liangliang, 杨亮亮 Yang; Qingfeng, 崔庆丰 Cui; Tao, 刘涛 Liu; Changxi, 薛常喜 Xue

doi:10.3788/aos201232.0412007

Cited by 2 publications

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“…式中 k 为仅与标记制作工艺相关的常量。通常一组标记由两块预设偏差为±d 的标记组成，第二次曝光时所 [8][9][10] 。二维单层周期结构的严格耦合波建模亦可分为：表达各区域电磁场，建立耦合波方程 [11] ，利用边界条件数值求解，可获得反射、透射系数，进而求取反射/透射率、椭偏参数、电磁场分布等 [12][13][14]…”

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Research on Diffraction-Based Overlay Measurement Using Two-Dimensional Periodic Structure

Bofang¹,

Hailiang²,

Fan³

et al. 2014

激光与光电子学进展

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Diffraction based overlay (DBO) metrology has fully demonstrated its remarkable advantages in terms of high resolution, high precision and low tool-induced shift (TIS) and so on. DBO technologies have been gradually replaced the traditional image based overlay (IBO) technologies and have also been developed to address the overlay metrology challenges for 22 nm technology node and beyond. In comparison with IBO technologies, the biggest problems that DBO faces now are high mark costs and long measurement time. IBO only uses single pad for two-dimensional (2D) overlay errors measurement, while DBO should adopt onedimensional gratings for measurement with x, y directions. Furthermore, at least two marks are needed for one direction measurement. We introduce 2D periodic structure based DBO technologies. The DBO physical model is established through rigorous coupling wave analysis (RCWA) program. The feasibility of this method is proved by means of analysis of the overlay measurement sensitivity and main measurement errors. The application of 2D DBO measurement technology can help to reduce the measurement time and mark cost by half. The DBO measurement cost will thus be dramatically lowered, and the measurement efficiency will be promoted.

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Research on Diffraction-Based Overlay Measurement Using Two-Dimensional Periodic Structure

Bofang¹,

Hailiang²,

Fan³

et al. 2014

激光与光电子学进展

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Diversified functions for a terahertz metasurface with a simple structure

Pan

2021

Opt. Express

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Here, we propose a new encoded metasurface with diﬀerent predesigned coding sequences to dynamic manipulate terahertz wavefront and realize various functionalities including beam splitting, anomalous beam deflection, vortex beam generation, angle controlled single-beam deflection, angle controlled multi-beam deflection, angle-controlled vortex beam generation and multi-vortex beam generation. The far-ﬁeld scattering patterns obtained by CST Microwave Studio demonstrate the behavior of the terahertz wave in each case and shows a high consistency with our theoretical prediction results. Due to the excellent properties of the diversified functionalities in a single structure at terahertz frequencies, the proposed encoded metasurface provides promising applications in terahertz multiple-input, multiple-output (MIMO) communication.

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Measurement of Diffraction Efficiency for Diffractive Optical Elements

Cited by 2 publications

References 0 publications

Research on Diffraction-Based Overlay Measurement Using Two-Dimensional Periodic Structure

Research on Diffraction-Based Overlay Measurement Using Two-Dimensional Periodic Structure

Diversified functions for a terahertz metasurface with a simple structure

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