“…Nonuniformity of thickness was less then 5%. X-ray spectral techniques allows us to define simultaneously element composition and thickness of a film (Laguiton & Parrich, 1977;Nazarov, 1991), to develop the analysis of multilayered samples in view of inside-and inter-layer matrix effects (Mantler, 1986;Huang & Parrich, 1986), to measure composition and component quantity of a gas mix in spherical targets (Weinstein & Weir, 1980;Ignat'ev et al, 2002), and composition of the shells. The difference between sphere centers of inner and outer surfaces was less then 0.2 mm.…”