Measurement Method of Film Parameters of Metal Based on Imaging Ellipsometry and Surface-Plasmon Resonance

Shiyu, 胡仕玉 Hu; Aijun, 曾爱军 Zeng; Liyuan, 谷利元 Gu; Huijie, 黄惠杰 Huang; Guohang, 胡国行 Hu; Hongbo, 贺洪波 He

doi:10.3788/cjl201542.1108001

中国激光

2015

DOI: 10.3788/cjl201542.1108001

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Measurement Method of Film Parameters of Metal Based on Imaging Ellipsometry and Surface-Plasmon Resonance

胡仕玉 Hu Shiyu¹,

曾爱军 Zeng Aijun²,

谷利元 Gu Liyuan³

et al.

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Measurement Method of Film Parameters of Metal Based on Imaging Ellipsometry and Surface-Plasmon Resonance

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