Measurement advances for micro-refractive fabrication

A combined Twyman–Green and Mach–Zehnder interferometer especially designed for the characterization of refractive microlenses is presented. This instrument allows for the quantitative characterization of the microlens form, the transmitted wavefront errors, the radius of curvature and the front focal length without removing the sample under test. All of these microlens properties are important when benchmarking different microlens fabrication technologies (Ottevaere et al 2006 J. Opt. A: Pure Appl. Opt. 8 S407–29). The interferometer was calibrated by the random ball test method. This paper describes the optical design and demonstrates the performance with the characterization of the instrument bias and measurements of a typical microlens. The performance is also compared with that of a semi-commercial instrument.

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“…This z displacement is acquired by the Sony laser scale. The displacement reading is displayed in the computer by ecounter software [11].…”

Section: Radius and Focal Length Measurementsmentioning

confidence: 99%

Micro-optic reflection and transmission interferometer for complete microlens characterization

Gómez¹,

Ghim²,

Ottevaere³

et al. 2009

Meas. Sci. Technol.

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“…They play an irreplaceable role in the development of the national economy and national defense technology, and are of great significance in promoting social and economic development. The related micro-nano technologies derived from micro-nano devices are representative of modern industrial cutting-edge technologies, and their related technological level has become an important indicator for measuring the development of national science and technology and industry [1][2][3]. The surface morphology of micro-nano devices directly determines their key performance, therefore the increasing precision of micro-nano devices poses a serious challenge to micro-nano detection technology.…”

Section: Introductionmentioning

confidence: 99%

Effective method of eliminating scan error in structured light measurement

Liu,

Zhu,

Chen

et al. 2023

Third International Computing Imaging Conference (CITA 2023)

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The structured light measurement method uses the principle that the fringe modulation information is sensitive to the object height information to realize the mapping from the fringe modulation information to the height information, which can be utilized to restore the three-dimensional shape of the object, smooth and rough surfaces. This method has a simple measurement system and belongs to coaxial measurement, which is considered a highly promising measurement method and has good application prospects in the field of aircraft surface shape measurement, surface defects detecting, etc. In most SIM, two essential parameters need to be accurately obtained to restore the 3D shape of the object which are the focus position of each pixel and the scan step. For years, researchers have constantly improved the structure of SIM system to obtain more accurate focus position to realize optimized measurement results. Meanwhile, the preset value of the scan step is directly substituted into calculation. However, the actual value of the scan step is very likely inconsistent with the preset value due to various factors in practical such as nonlinear motion of scan actuator, which will introduce great error into the measurement result. However, in the current structured light measurement methods, there is no solution to the problem of errors caused by the scanning system, which limits the further improvement of measurement accuracy and repeatability. In this paper, a random scanning error suppression method is proposed to solve this problem. The principle of mutual calibration of the second order slope of the theoretical modulation curve and the second order slope of the actual modulation curve of the grating fringe is used to achieve the accurate value of the scan step. Theoretical analysis and simulation are carried out to verify the feasibility of the proposed method.

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Measurement advances for micro-refractive fabrication

Cited by 2 publications

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Micro-optic reflection and transmission interferometer for complete microlens characterization

Micro-optic reflection and transmission interferometer for complete microlens characterization

Effective method of eliminating scan error in structured light measurement

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