2019
DOI: 10.1021/acs.jpcc.9b01653
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MD-Based Transport and Reaction Model for the Simulation of SIMS Depth Profiles of Molecular Targets

Abstract: We present a novel theoretical approach allowing us to model erosion and chemical alteration of organic samples during depth profiling analysis by secondary-ion mass spectrometry with cluster projectile ion beams. This approach is able to take into account all of the cumulative phenomena occurring during such analysis, including ion-beam-induced reactions and atomic/molecular mixing by means of the numerical solution of an advection–diffusion–reaction (ADR) differential equation. The results from the single-im… Show more

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Cited by 2 publications
(3 citation statements)
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“…This damage accumulates and thus the abundance of intact molecules on the sample surface drops with increasing ion fluence until the concentration of intact molecules in the sample reaches a steady state for high ion fluences. The steady state reflects a balance between the material removed from the sample and new fragments induced in the sample. , This characteristic behavior has been observed in various SIMS depth profiling experiments and was modeled based on the erosion dynamics in an active region below the surface. , A model based on a modified diffusion equation for the concentration of intact molecules as a function of depth in the sample was applied to include these effects in the description of SIMS depth profiles of more complex systems. , …”
Section: Resultsmentioning
confidence: 90%
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“…This damage accumulates and thus the abundance of intact molecules on the sample surface drops with increasing ion fluence until the concentration of intact molecules in the sample reaches a steady state for high ion fluences. The steady state reflects a balance between the material removed from the sample and new fragments induced in the sample. , This characteristic behavior has been observed in various SIMS depth profiling experiments and was modeled based on the erosion dynamics in an active region below the surface. , A model based on a modified diffusion equation for the concentration of intact molecules as a function of depth in the sample was applied to include these effects in the description of SIMS depth profiles of more complex systems. , …”
Section: Resultsmentioning
confidence: 90%
“…In order to gain a better understanding of how the signal evolves as a function of the primary-ion fluence and how it is linked to properties of the primary-ion species, we have developed a model similar to the transport and reaction model described in refs and . We, also, take into account the concentration of intact molecules as a function of depth in the sample in order to describe the different behavior of the DINeC and SIMS signals observed in the experiments.…”
Section: Resultsmentioning
confidence: 99%
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