Molecular Beam Epitaxy 2013
DOI: 10.1016/b978-0-12-387839-7.00006-3
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MBE growth of high-mobility 2DEG

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Cited by 10 publications
(6 citation statements)
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“…This mobility degradation is predominantly due to migration of Si dopant atoms occurring mainly in the crystal growth direction 26 . Nevertheless, when a sufficiently large undoped setback is incorporated, rather high quality single heterostructures 26 and ultra-high mobility double heterointerface doped structures have been demonstrated [27][28][29] . Here, we use a setback of 50 nm, larger than the ∼30 nm exponential Si-tail 26 .…”
mentioning
confidence: 99%
“…This mobility degradation is predominantly due to migration of Si dopant atoms occurring mainly in the crystal growth direction 26 . Nevertheless, when a sufficiently large undoped setback is incorporated, rather high quality single heterostructures 26 and ultra-high mobility double heterointerface doped structures have been demonstrated [27][28][29] . Here, we use a setback of 50 nm, larger than the ∼30 nm exponential Si-tail 26 .…”
mentioning
confidence: 99%
“…To discuss the effect of buffer layer during the growth process, impurities are unavoidably present in and on the substrate for migrating towards the epitaxial layers as noticed by Umansky's group [36]. Development of a comparatively thick buffer layer, which in many cases comprises of AlGaA-GaAs superlattice (SL) because of the high-chemical reactivity of the aluminum-containing layers for retarding impurities from migrating.…”
Section: Resultsmentioning
confidence: 99%
“…Development of a comparatively thick buffer layer, which in many cases comprises of AlGaA-GaAs superlattice (SL) because of the high-chemical reactivity of the aluminum-containing layers for retarding impurities from migrating. Apparently, the selection of compensating doping density is based on to ensure complete ionization of dopants in order to avoid a parallel conductance path [36].…”
Section: Resultsmentioning
confidence: 99%
“…For example, quantum dots (zero-dimensional restriction) are capable to emit radiation in the THz region as result of their energy states, which depend on its physical dimensions and act as recombination centers for carriers generated in the GaAs layers within the structure when they are exited with a femtosecond optical pump at 800 nm [10]. Additionally, MBE allows for the construction of semiconductor structures with atomically abrupt and flat interfaces that in conjunction with band-structure engineering permit the obtention of high-purity heterostructures embedding a two-dimensional electron gas (2DEG) [11]. In the heterostructures with 2DEG, carriers are confined to a very narrow layer of thickness smaller than De Broglie wavelength which can travel without scattering caused principally by impurities.…”
Section: Introductionmentioning
confidence: 99%
“…The speed of transistors has been increased over time. HEMTs have demonstrated the highest frequency of operation over 1.5 THz when a combination of techniques such as reducing gate length, material purity, and doping schemes are used in their fabrication [11][12][13].…”
Section: Introductionmentioning
confidence: 99%