Mathematical Models of MEMS Control Devices

Abstract

This article discusses MEMS actuators of various types (electrostatic, magnetic, piezoelectric, thermal actuators). The features of their designs are considered. Methods for constructing mathematical models of these actuators and possibilities of their application in the design of complex technical systems using such actuators are analyzed. An example of calculating the characteristic of the inductance of a nano-solenoid, which is a component of an electromagnetic actuator, is provided.