Mathematical modeling of different diaphragm geometries in MEMS pressure sensor

Jena, Sudarsana; Pandey, Chandan; Gupta, Ankur

doi:10.1016/j.matpr.2020.11.249

Cited by 4 publications

(2 citation statements)

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“…In general, the membranes used are rectangular or square since they occupy a lesser area, enable easier lithography and fabrication compared to circular ones. Since the stress induced in the square diaphragm is very high, therefore such diaphragm is more sensitive than others (Jena et al , 2021) but it also has a high-stress gradient and any shortcomings in the fabrication process will affect the sensor performance.…”

Section: Miniaturization Of Pressure Sensorsmentioning

confidence: 99%

“…They are smaller, faster, and are less expensive than their macroscopic counterparts. The working procedure of most MEMS-based pressure sensors is based on the bending effect on a thin diaphragm due to the application of external pressure (Jena et al , 2021). The thin diaphragm will be subjected to internal stress due to bending which can be sensed in form of an electrical signal employing different sensing mechanisms such as capacitive, optical, resonant, and piezoresistive.…”

Section: Introductionmentioning

confidence: 99%

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Review on pressure sensors: a perspective from mechanical to micro-electro-mechanical systems

Jena

Gupta

2021

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Purpose Considering its vast utility in industries, this paper aims to present a detailed review on fundamentals, classification and progresses in pressure sensors, along with its wide area of applications, its design aspects and challenges, to provide state-of-the-art gist to the researchers of the similar domain at one place. Design/methodology/approach Swiftly emerging research prospects in the micro-electro-mechanical system (MEMS) enable to build complex and sophisticated micro-structures on a substrate containing moving masses, cantilevers, flexures, levers, linkages, dampers, gears, detectors, actuators and many more on a single chip. One of the MEMS initial products that emerged into the micro-system technology is MEMS pressure sensor. Because of their high performance, low cost and compact in size, these sensors are extensively being adopted in numerous applications, namely, aerospace, automobile and bio-medical domain, etc. These application requirements drive and impose tremendous conditions on sensor design to overcome the tedious design and fabrication procedure before its reality. MEMS-based pressure sensors enable a wide range of pressure measurement as per the application requirements. Findings The paper provides a detailed review on fundamentals, classification and progresses in pressure sensors, along with its wide area of applications, its design aspects and challenges, to provide state of the art gist to the researchers of the similar domain at one place. Originality/value The present paper discusses the basics of MEMS pressure sensors, their working principles, different design aspects, classification, type of sensing diaphragm used and illustration of various transduction mechanisms. Moreover, this paper presents a comprehensive review on present trend of research on MEMS-based pressure sensors, its applications and the research gap observed till date along with the scope for future work, which has not been discussed in earlier reviews.

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Section: Miniaturization Of Pressure Sensorsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%