Mathematical Model and Simulation for Testing Aspheric Surface Using the Digital Moiré Patterns by Circular Sub-Region Stitching Method

Abstract

sub-region stitching measurement of asphere by using the combination of digital moire patterns without compensator, auxiliary mirror and other assistant modules. This paper illustrated the principal theory. And use of digital filtering, phase shifting, the least square method and Zernike polynomial fitting to establish the reasonable mathematical model. Meanwhile the computer simulation experiment was carried on. the PV and RMS of the full aperture phase distribution residual error are 0.058λand 0.0087λ After this method processing.