Materials and Device Strategies for Nanoelectronic 3D Heterogeneous Integration

Zhou, Guanyu; Sun, Tian Chuan; Younas, Rehan; Hinkle, Christopher L.

doi:10.1109/sispad54002.2021.9592592

Cited by 1 publication

(4 citation statements)

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“…Moreover, when there is an irregularity in the thickness of the 2D layer, such that there are regions where the thickness is greater than the critical thickness for remote interaction, epitaxy in those areas will not take place . All these reports, consistently stress the elimination of transferred vdW layers and highlight the importance of contamination-free, uniformly grown 2D layers as the ideal pathway for reliable remote epitaxy …”

Section: Discussionmentioning

confidence: 91%

Section: Discussionmentioning

confidence: 99%

“…An increase in the crystallinity and grain size of the epi-film have been observed when an intermediate 2D layer is used (Figure d,e) . Zhou et al , used a MBE grown intermediate WSe 2 layer to improve the growth quality of zinc selenide (ZnSe) on sapphire at BEOL compatible temperatures (Figure f). ZnSe is a promising p-type semiconductor and is sought after as a channel material for BEOL transistors.…”

Section: Discussionmentioning

confidence: 99%

“…186 All these reports, consistently stress the elimination of transferred vdW layers and highlight the importance of contamination-free, uniformly grown 2D layers as the ideal pathway for reliable remote epitaxy. 187 Though remote epitaxy is still in its early stage of development, it is already showing potential for a variety of applications such as the growth of free-standing devices, flexible electronics, and light-emitting diodes (LEDs). 178 In addition to this, remote epitaxy can help improve the overall growth quality of a material as well.…”

Section: Machine Learning In 2d Materialsmentioning

confidence: 99%

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Recent Advances in 2D Material Theory, Synthesis, Properties, and Applications

et al. 2023

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Two-dimensional (2D) material research is rapidly evolving to broaden the spectrum of emergent 2D systems. Here, we review recent advances in the theory, synthesis, characterization, device, and quantum physics of 2D materials and their heterostructures. First, we shed insight into modeling of defects and intercalants, focusing on their formation pathways and strategic functionalities. We also review machine learning for synthesis and sensing applications of 2D materials. In addition, we highlight important development in the synthesis, processing, and characterization of various 2D materials (e.g., MXnenes, magnetic compounds, epitaxial layers, low-symmetry crystals, etc.) and discuss oxidation and strain gradient engineering in 2D materials. Next, we discuss the optical and phonon properties of 2D materials controlled by material inhomogeneity and give examples of multidimensional imaging and biosensing equipped with machine learning analysis based on 2D platforms. We then provide updates on mix-dimensional heterostructures using 2D building blocks for next-generation logic/memory devices and the quantum anomalous Hall devices of high-quality magnetic topological insulators, followed by advances in small twist-angle homojunctions and their exciting quantum transport. Finally, we provide the perspectives and future work on several topics mentioned in this review.

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Section: Discussionmentioning

confidence: 91%

Section: Discussionmentioning

confidence: 99%