Material removal characteristics of orthogonal velocity polishing tool for efficient fabrication of CVD SiC mirror surfaces

Seo, Hyunju; Han, Jeong Yeol; Kim, Sug Whan; Seong, Sehyun; Yoon, Siyoung; Lee, Kyungmook; Lee, Haeng-Bok

doi:10.1117/12.2188805

Cited by 1 publication

(13 citation statements)

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“…1 [19], OVT uses a patented concept of a bicycle type rotating tool rubbing the workpiece surface. The tool is configured such that it rotates about two orthogonal axes (e.g.…”

Section: Conceptmentioning

confidence: 99%

“…The machine is also equipped with a slurry feeding sub-system so that the polishing slurry can be supplied at a constant rate during machine run. The machine characteristics are summarized in Table 1 [19]. …”

Section: Polishing Machine With Ovtmentioning

confidence: 99%

“…The average pressure was subsequently obtained from the exerted force reading divided by the tool-workpiece contact area, which has the shape of an ellipse. Figure 3 [19] shows the resulting relationship between the polishing pressure and the exerted force, and the least square linear fitting produced Eq. (2) [19] as its mathematical expression.…”

Section: Pressure Distributionmentioning

confidence: 99%

“…In order to overcome the aforementioned shortcomings, we developed a new patented polishing tool called the Orthogonal Velocity field Tool (OVT) [18,19]. As mentioned in Section 2.1, OVT produces tool rotations at about two independent axes simultaneously.…”

Section: Introductionmentioning

confidence: 99%

“…The development of the OVT [18,19] and initial experiment results were introduced to the community elsewhere in an earlier study without a detailed description of the technical and theoretical elements [19]. We address this shortcoming with a detailed description of the theoretical model of the OVT and experiments conducted in the study.…”

Section: Introductionmentioning

confidence: 99%

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Novel orthogonal velocity polishing tool and its material removal characteristics from CVD SiC mirror surfaces

et al. 2016

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A new and patented polishing tool called Orthogonal Velocity field Tool (OVT) was built and its material removal characteristics from Chemical Vapor Deposition Silicon Carbide (CVD SiC) mirror surfaces were investigated in this study. The velocity field of OVT is produced by rotating the bicycle type tool in the two orthogonal axes, and this concept is capable of producing a material removal foot print of pseudo Gaussian shapes. First for the OVT characterization, we derived a theoretical material removal model using distributions of pressure exerted onto the workpiece surface, relative speed between the tool and workpiece surface, and dwell time inside the tool- workpiece contact area. Second, using two flat CVD SiC mirrors that are 150 mm in diameter, we ran material removal experiments over machine run parameter ranging from 12.901 to 25.867 psi in pressure, from 0.086 m/sec to 0.147 m/sec tool in the relative speed, and 5 to 15 sec in dwell time. Material removal coefficients are obtained by using the in-house developed data analysis program. The resulting material removal coefficient varies from 3.35 to 9.46 um/psi hour m/sec with a mean value of 5.90 ± 1.26(standard deviation). We describe the technical details of the new OVT machine, the data analysis program, the experiments, and the results together with the implications to the future development of the machine.

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“…1 [19], OVT uses a patented concept of a bicycle type rotating tool rubbing the workpiece surface. The tool is configured such that it rotates about two orthogonal axes (e.g.…”

Section: Conceptmentioning

confidence: 99%

Section: Polishing Machine With Ovtmentioning

confidence: 99%