2020
DOI: 10.1016/j.ceramint.2019.11.006
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Material removal and interactions between an abrasive and a SiC substrate: A molecular dynamics simulation study

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Cited by 43 publications
(15 citation statements)
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“…As an alternative approach, MD simulation can be utilized to analyze very large systems, with thousands to millions of atoms 30 . Additionally, as a complement to the experimental test, MD simulation is a helpful tool to deepen the understanding of the mechanical and thermal properties at the nanoscale [31][32][33][34][35] .…”
mentioning
confidence: 99%
“…As an alternative approach, MD simulation can be utilized to analyze very large systems, with thousands to millions of atoms 30 . Additionally, as a complement to the experimental test, MD simulation is a helpful tool to deepen the understanding of the mechanical and thermal properties at the nanoscale [31][32][33][34][35] .…”
mentioning
confidence: 99%
“…It should be noted that it is difficult for the abrasive to directly perform both translation and rotation in LAMMPS. To deal with this problem, the substrate moves with a velocity of 100 m/s along the x-axis direction while the abrasive rotates around its center in place [44]. The combined motion of the substrate and abrasive is equivalent to the abrasive rolling along the negative x-axis.…”
Section: Methodsmentioning
confidence: 99%
“…Among the various machining methods, chemical mechanical polishing (CMP) has been regarded as an effective way to obtain the surface with ultra-high quality and small subsurface damage [7]. However, as the material removal and deformation process of CMP is at nano-/ subnanometer scale, it is difficult to elucidate the material deformation mechanisms through in situ experiments [8,9].…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, this report surveys the effect of substrate temperature from 300 to 1200 K on the machining process. Ordinarily, most studies decide to choose a perfectly flat surface 36 38 , a rough surface 39 41 , or a surface covered by a thin amorphous/oxidation layer 42 44 to investigate the tribological properties. This report tries to examine both a perfect flat surface and a deformed surface by machining for one time or multi-times, as shown in Fig.…”
Section: Methodsmentioning
confidence: 99%