Abstract:Mass spectrometric measurements of positive ions emerging from Ar-plasmas at 0.1-0.6 Torr are described. The adaption of the mass spectrometer requires besides the extraction probe an ion optical system, which causes the focussing and bunching of the ion current on the entrance of the time-of-flight mass spectrometer. Systematic measurements of the velocity distributions of the different ion species reveal:1. The Bohm-criterion is confirmed. In front of the wall the ions are heated in the quasineutral zone and… Show more
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