Mass Separation of Water Cluster Ion Beam Using Two Rotating Electric Fields and Sputtering of a Polymer Thin Film

Nojima, Masashi; Mita, Hiroto; Hara, Kazuma

doi:10.1380/ejssnt.2020.101

Cited by 4 publications

(2 citation statements)

References 15 publications

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“…The advantage of VES is that it can generate a finely focused ion beam from an electrospray source. The earlier research demonstrated the precise focusing of ion beams using the VES method [11].…”

Section: B Metallic Solution Ion Sourcementioning

confidence: 99%

“…Another mass filtering application on water cluster ion beams generated through the vacuum electrospray (VES) method was also investigated. Within 20 μm of a beam diameter, the selected water cluster ion beam drew a distinct sputtered spiral groove on a spin-coated polystyrene polymer thin film on a Si wafer [11]. VES state measurements and a REFMS-based separation were also conducted to discuss the behavior of 2-(2-butoxyethoxy) ethanol (DEGBE) as a mobile phase [12].…”

Section: Introductionmentioning

confidence: 99%

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Development of Mass-controlled Ion Beam through a Vacuum Electrospray Method

Nojima

2022

e-J. Surf. Sci. Nanotechnol.

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Generally, focused ion beams are generated via the ionization process of liquid metal ion sources (LMISs); the LMIS components are made from pure liquid metals or alloys. Because of high operating cost associated with LMISs, suitable alternatives for a low-cost ion beam source must be explored. In this study, a Co nitrate solution containing ethanol and 2-(2-butoxyethoxy) ethanol solvent was prepared to form an ion source containing metallic ions. The Co-contained ion beams are generated through a vacuum electrospray method. I estimated the mass-controlled ion beams using rotating electric field mass analyzers (REFMS). I focused on three mass-controlling states at typical frequencies (300, 350, and 400 kHz). The distributions of the Co image indicate the successful generation of a mass-controlled ion beam. This mass-controlling system will allow for elemental-driven fabrication processs governed by the periodic law via REFMS.

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Section: B Metallic Solution Ion Sourcementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Development of Mass-controlled Ion Beam through a Vacuum Electrospray Method

Nojima

2022

e-J. Surf. Sci. Nanotechnol.

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Roadmap for focused ion beam technologies

Höflich,

Hobler,

Allen

et al. 2023

Applied Physics Reviews

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The focused ion beam (FIB) is a powerful tool for fabrication, modification, and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques, and applications. By viewing FIB developments through the lens of various research communities, we aim to identify future pathways for ion source and instrumentation development, as well as emerging applications and opportunities for improved understanding of the complex interplay of ion–solid interactions. We intend to provide a guide for all scientists in the field that identifies common research interest and will support future fruitful interactions connecting tool development, experiment, and theory. While a comprehensive overview of the field is sought, it is not possible to cover all research related to FIB technologies in detail. We give examples of specific projects within the broader context, referencing original works and previous review articles throughout.

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Mass-selected ion beam generation using two rotating electric-field mass separation technique

Nojima

2023

AIP Advances

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This paper describes the origin, principles, practical applications, and future perspectives of mass-selected ion beams generated using two rotating electric-field mass (REF-MS) filters. Our team has been investigating the underlying principles of REF-MS separation and assessing the feasibility of developing suitable systems to realize mass separation and ion beam convergence using rotating electric fields as well as the practicability of this method. This paper focuses on the mechanism underlying the observed cycloid trajectories followed by REF-MS-selected ions. A focused ion beam column with Ga and AuGe liquid metal ion sources (LMISs) was connected to REF-MS optics to assess the mass-selection performance of the filter. The mass-separation ability of this system was demonstrated by the ion projection images of Ga-LMIS (69Ga+ and 71Ga+) and AuGe-LMIS (97Au2+, Au2Ge+, and Au2Ge2+). The column was then replaced with a vacuum electrospray ionization (ESI) source. The size-selected water-cluster ion beams [(H2O)nH]+ were separated based on cluster size, and a microscale crater was created. Co-containing molecular ion beams were revealed using different concentrations of ESI sources, and a mass-separated [Co(DEGBE)4]+ ion beam was constructed.

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Mass Separation of Water Cluster Ion Beam Using Two Rotating Electric Fields and Sputtering of a Polymer Thin Film

Cited by 4 publications

References 15 publications

Development of Mass-controlled Ion Beam through a Vacuum Electrospray Method

Development of Mass-controlled Ion Beam through a Vacuum Electrospray Method

Roadmap for focused ion beam technologies

Mass-selected ion beam generation using two rotating electric-field mass separation technique

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