2006
DOI: 10.1088/0022-3727/39/12/023
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Mass removal modes in the laser ablation of silicon by a Q-switched diode-pumped solid-state laser (DPSSL)

Abstract: A fundamental study on the Q-switched diode-pumped solid-state laser interaction with silicon was performed both experimentally and numerically. Single pulse drilling experiments were conducted on N-type silicon wafers by varying the laser intensity from 10 8-10 9 W cm −2 to investigate how the mass removal mechanism changes depending on the laser intensity. Hole width and depth were measured and surface morphology was studied using scanning electron microscopy. For the numerical model study, Ki et al's self-c… Show more

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Cited by 27 publications
(6 citation statements)
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“…Therefore, depending on interaction parameters T ␤ could be practically the maximum temperature a material can attain. Note that as reported by Lim et al 14 small amounts of energy, so it is believed that even with the fluid flow these results are not much different from what is discussed here.…”
Section: -4supporting
confidence: 70%
“…Therefore, depending on interaction parameters T ␤ could be practically the maximum temperature a material can attain. Note that as reported by Lim et al 14 small amounts of energy, so it is believed that even with the fluid flow these results are not much different from what is discussed here.…”
Section: -4supporting
confidence: 70%
“…[5][6][7][8][9][10] Plant leaves, especially green leaves, are common landscaping and agricultural materials and lasers could be creatively used for many possible innovative applications. Plant leaves exhibit very complicated optical properties because they have complex multilayer structures and are basically a composite of many dissimilar optical elements, including photosynthesizing pigments.…”
mentioning
confidence: 99%
“…They demonstrate, however, a variety of physical effects that have not been fully understood. There are still debates about ultrafast melting, 1-5 resolidification dynamics, [6][7][8] surface structure modification, 9,10 thermal and nonthermal mechanisms of ablation, 6,[11][12][13][14][15][16][17][18] and direct cluster emission. 16,[19][20][21] This stimulates extensive studies, both experimental and theoretical, of the dynamics of laser heating, melting, resolidification, and ablation of silicon under laser irradiation with different pulse durations and laser wavelengths.…”
Section: Introductionmentioning
confidence: 99%