2011
DOI: 10.1063/1.3562948
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Mass flow rate measurements in microtubes: From hydrodynamic to near free molecular regime

Abstract: International audienceAn experimental investigation of the reflection/accommodation process at the wall in a single silica microtube and isothermal stationary flow conditions was carried out. Several gases and different diameters were studied through various regimes. Especially for helium, the Knudsen number range was investigated as far as the free molecular regime. This kind of investigation requires a powerful experimental platform to measure mass flow rates, which we have carried out. An analytic expressio… Show more

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Cited by 71 publications
(71 citation statements)
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“…The first one focuses on measurements of flow rates in micro-channels (see, for example, Refs. [20][21][22][23][24][25]. Several theoretical approaches are being applied to derive slip and accommodation coefficients from the experimental data.…”
Section: Introductionmentioning
confidence: 99%
“…The first one focuses on measurements of flow rates in micro-channels (see, for example, Refs. [20][21][22][23][24][25]. Several theoretical approaches are being applied to derive slip and accommodation coefficients from the experimental data.…”
Section: Introductionmentioning
confidence: 99%
“…The same arguments as we used in the previous section lead to a system very similar to (11)(12)(13)(14), except that equation (13) now contains a collision term in the right-hand side since gas atom-phonon collisions can occur:…”
Section: New Boundary Conditions For the Boltzmann Equationmentioning
confidence: 96%
“…Then (13)- (14) can be integrated exactly, and the outgoing value F (t, x, y, 0, v x , v z )| vz<0 can be written as a function of the incoming value (14). This outgoing value can be used in the implicit boundary condition (12), that can now be written explicitly as…”
Section: New Boundary Conditions For the Boltzmann Equationmentioning
confidence: 99%
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