Mass flow measurement through rectangular microchannel from hydrodynamic to near free molecular regimes

Nacer, M. Hadj; Graur, Irina; Perrier, Pierre

doi:10.1051/lhb/2011040

Cited by 8 publications

(5 citation statements)

References 18 publications

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“…Third is the constant volume (CV) technique, 5,9,[11][12][13][14][15] which is similar to the dual tank accumulation method, but the absolute pressure variation in the tanks is measured. This approach needs very high thermal stability.…”

Section: Introductionmentioning

confidence: 99%

Gas flow through microtubes with different internal surface coatings

Nacer

Graur

Perrier

et al. 2013

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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International audienceAn experimental setup based on the constant volume technique is developed to measure the mass flow rate through microtubes under isothermal stationary flow conditions. Four different working gases (helium, nitrogen, argon, and carbon dioxide), and two surface materials (stainless steel and Sulfinert) are considered. The Knudsen number calculated for the experimental conditions varies from $10 À4 (hydrodynamic regime) to $ 5 (transitional regime). In the reduced range ð10 À4 À 0:1Þ corresponding to the hydrodynamic and slip regimes, an approach based on the analytical solution of the Stokes equation subjected to a first order velocity slip boundary condition is used. The velocity slip coefficient and the tangential momentum accommodation coefficient are extracted from the experimental data of the mass flow rate using their analytical expressions. The results are summarized in the tables representing the accommodation coefficients for the corresponding gas-surface material combinations. The influence of the molecular mass on the tangential momentum accommodation coefficient is discussed. In addition, an original technique is proposed to extract the accommodation coefficient in the whole experimentally available range ð10 À4 À 5Þ of the gas rarefaction. The accommodation coefficients obtained using this technique are close to those found in the slip regime

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Section: Introductionmentioning

confidence: 99%

Gas flow through microtubes with different internal surface coatings

Nacer

Graur

Perrier

et al. 2013

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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show abstract

“…Hadj Nacer et al 1 measured slip coefficients from He and Ar gas flows in a silicon microchannel covered with gold. They obtained β 1 values of 1.305 ± 0.018 and 1.342 ± 0.019 for He and Ar, respectively.…”

Section: Resultsmentioning

confidence: 99%

“…These values are much higher than those presented in Table 3 for the rough surface, indicating that the present surface is not rough enough. In the experimental work of Hadj Nacer et al, 1 the roughness of the gold coating, realized by vapor deposition, was evaluated at 0.87 nm. This value corresponds roughly to 6 times the gold atom bulk radius.…”

Section: Resultsmentioning

confidence: 99%

“…Gold is also a common coating of MEMS channel surfaces because it is a soft material which presents a strong resistance to oxidation and a reasonably high thermal conductivity. As an illustrative example, Hadj Nacer et al , have experimentally studied the flow of different gases (helium, argon, carbon dioxide, and nitrogen) through microtubes with different coatings, including gold, to obtain accommodation coefficients.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Helium and Argon Interactions with Gold Surfaces: Ab Initio-Assisted Determination of the He–Au Pairwise Potential and Its Application to Accommodation Coefficient Determination

Liao

Grenier

et al. 2018

J. Phys. Chem. C

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Global potentials for the extremely weak interaction between the He atom and gold surfaces are determined from ab initio calculations and validated with experimental-based determinations of well depth values. Dispersionless density functional periodic calculations are combined with effective pairwise functional parameters for the dispersion. These parameters are obtained from time-dependent density functional theory response theory using localized Hartree−Fock orbitals, as applied on He−Au n clusters. This He−Au pairwise potential is used in molecular dynamics simulations of gas−gold surface collisions from which incident and reflected gas atom velocities allow the determination of energy and momentum accommodation coefficients. Boundary quantities such as slip velocity and thermal resistance are not only derived from these coefficients, but also from a new methodology based on a nonparametric kernel, avoiding the atomic description of the gold surface. Similar collision simulations are performed for Ar for comparison. A model of a rough gold surface is also investigated.

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“…The mass flow rate is deduced from the law of perfect gas. • The constant volume technique (CV) is used by following authors: [2], [7], [9], [10], [11].…”

Section: Introductionmentioning

confidence: 99%

Experimental study of the gas flows through channels with circular cross sections

Hadj-Nacer¹,

Perrier²,

Méolans³

et al. 2012

J. Phys.: Conf. Ser.

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The experimental setup based on the constant volume technique is developed to measure the mass flow rate through the microtubes under the isothermal flow conditions. Four different gases: Helium, Nitrogen, Argon and Carbon dioxide, and two surface materials (Stainless stainless Steel steel and Sulfinert) are considered. In this study the Knudsen number varies from ∼ 10 −4 to 0.3. In this range the approach based on the analytical solution of the Stokes equation subjected to the first and second order velocity slip boundary conditions is used. The tangential momentum accommodation coefficient (TMAC) is extracted from the experimental data on the mass flow rate using its analytical expression. The results are summarized in the tables representing the accommodation coefficients for the couples corresponding gas-surface material combinations. The influence of the molecular mass on the tangential momentum accommodation is discussed.

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Mass flow measurement through rectangular microchannel from hydrodynamic to near free molecular regimes

Cited by 8 publications

References 18 publications

Gas flow through microtubes with different internal surface coatings

Gas flow through microtubes with different internal surface coatings

Helium and Argon Interactions with Gold Surfaces: Ab Initio-Assisted Determination of the He–Au Pairwise Potential and Its Application to Accommodation Coefficient Determination

Experimental study of the gas flows through channels with circular cross sections

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