Mass Fabrication of WS₂ Nanodisks and their Scattering Properties

Abstract

High‐index all‐dielectric resonators have been developed into an important platform for light manipulation at the nanoscale over the past decade. Although they are widely used as 2D materials, transition metal dichalcogenides (TMDCs), as an emerging all‐dielectric material, have also been used to fabricate optical nanoantennas that support multipolar Mie resonances. However, their fabrication depends heavily on electron‐beam lithography (EBL) or focused ion beam (FIB), which is expensive and time‐consuming for practical applications. To address this issue, here, a fast low‐cost method is put forward which combines polystyrene (PS) nanospheres with physical vapor deposition by electron‐beam evaporation and magnetron sputtering to fabricate WS2 nanodisks in a mass‐production manner. After annealing, the A‐ and B‐exciton features as well as anapole states are observed in the scattering spectra of WS2 nanodisks. The light scattering anisotropy of individual WS2 nanodisks and spectral tunability of the anapole are studied. In addition, absorption enhancement due to the strong field localization of anapole states in hexagonal WS2 nanodisk arrays is numerically demonstrated. This work manifests that this etching‐free method is promising for fabrication of scalable TMDC nanodisks suitable for practical applications.

Deterministic Excitation of Polarization‐Sensitive Extrinsic Anapole State in Si Nanodisk Clusters

“…The clusters are fabricated by a low-cost etching-free method that combines polystyrene (PS) nanospheres self-assembly with film deposition. [42,43] We observe two distinct dips in the scattering spectrum of a Si nanodisk dimer that represent the intrinsic and extrinsic anapole states, respectively. The latter is dependent on the polarization of excitation while the former is not.…”

Intersectional nanofabrication of disk nanoantennas by colloidal lithography

“…Here we introduce a versatile method capable of scalable and low-cost fabrication of both metallic and dielectric nanoantennas using a gold nanohole film as a sacrificial layer that is fabricated with polystyrene (PS) nanospheres with different diameters [12,13]. Spectrally selective nanodisks with various sizes and (composite) materials are fabricated in this fashion over the centimeter-scale substrates.…”

Nanostructured Transition Metal Dichalcogenide Multilayers for Advanced Nanophotonics

“…[26,27] Nanostructured multilayer TMDs are thus promising candidates for future nanophotonic and optoelectronic applications. [18,28] Although several examples of TMD nanostructuring have already been reported in the literature, [4][5][6][7][8][9]24,25,[29][30][31][32] detailed investigations of nanopatterned TMDs as well as advanced ways of their nanofabrication are just starting to appear. Thus, a material-oriented study focusing on advanced nanofabrication procedures for TMD multilayers and demonstrating a potential of all-TMD nanophotonics is of high contemporary interest.…”