Mass density determination of thin organosilicon films by X-ray reflectometry

Lee, A. van der; Roualdès, S.; Berjoan, R.; Durand, J.

doi:10.1016/s0169-4332(00)00890-4

Cited by 16 publications

(11 citation statements)

References 18 publications

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“…A similar mass density of organosilicon plasma polymer films has been reported by Van der Lee and co-workers. 12 The density of the HMDSO film was determined to be lower than the AA plasma polymer, which can be explained in part by the greater bond length (1.64 Å) and angle (143°) of Si-O-Si species compared to the C-C tetrahedral geometry of (1.53 Å and 110°) the AA plasma polymer.…”

Section: Resultsmentioning

confidence: 93%

X-Ray and Neutron Reflectometry Study of Glow-Discharge Plasma Polymer Films

et al. 2005

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Radio-frequency glow-discharge plasma polymer thin films of allylamine (AA) and hexamethyldisiloxane (HMDSO) were prepared on silicon wafers and analyzed by a combination of X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), X-ray reflectometry (XRR), and neutron reflectometry (NR). AFM and XRR measurements revealed uniform, smooth, defect-free films of 20-30 nm thickness. XPS measurements gave compositional data on all elements in the films with the exception of hydrogen. In combination with XRR and NR, the film composition and mass densities (1.46 and 1.09 g cm(-)(3) for AA and HMDSO, respectively) were estimated. Further NR measurements were conducted with the AA and HMDSO films in contact with water at neutral pH. Three different H(2)O/D(2)O mixtures were used to vary the contrast between the aqueous phase and the polymer. The amount of water penetrating the film, as well as the number of labile protons present, was determined. The AA film in contact with water was found to swell by approximately 5%, contain approximately 3% water, and have approximately 24% labile protons. The HDMSO polymer was found to have approximately 6% labile protons, no thickness increase when in contact with water, and essentially no solvent penetration into the film. The difference in the degree of proton exchange within the films was attributed to the substantially different surface and bulk chemistries of the two films.

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Section: Resultsmentioning

confidence: 93%

X-Ray and Neutron Reflectometry Study of Glow-Discharge Plasma Polymer Films

et al. 2005

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“…27 This method allowed us to determine thickness of the layer, electron density and roughness of the sample's surface and interface. 28,29 It should be mentioned that this method allows the determination of the global roughness of the sample. X-ray photoelectron spectroscopy (XPS) measurements were made using a Scienta R4000 hemispherical analyzer (pass energy 200 eV) and Al K α (1486.6 eV) excitation.…”

Section: Test Equipmentmentioning

confidence: 99%

<p>Zirconium Oxide Thin Films Obtained by Atomic Layer Deposition Technology Abolish the Anti-Osteogenic Effect Resulting from miR-21 Inhibition in the Pre-Osteoblastic MC3T3 Cell Line</p>

Seweryn¹,

Pielok²,

Ławniczak-Jabłońska³

et al. 2020

IJN

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The development of the field of biomaterials engineering is rapid. Various bioactive coatings are created to improve the biocompatibility of substrates used for bone regeneration, which includes formulation of thin zirconia coatings with pro-osteogenic properties. The aim of this study was to assess the biological properties of ZrO 2 thin films grown by Atomic Layer Deposition (ALD) technology (ZrO 2 ALD). Methodology: The cytocompatibility of the obtained layers was analysed using the mice preosteoblastic cell line (MC3T3) characterized by decreased expression of microRNA 21-5p (miR-21-5p) in order to evaluate the potential pro-osteogenic properties of the coatings. The in vitro experiments were designed to determine the effect of ZrO 2 ALD coatings on cell morphology (confocal microscope), proliferative activity (cell cycle analysis) and metabolism, reflected by mitochondrial membrane potential (cytometric-based measurement). Additionally, the influence of layers on the expression of genes associated with cell survival and osteogenesis was studied using RT-qPCR. The following genes were investigated: B-cell lymphoma 2 (Bcl-2), Bcl-2-associated X protein (Bax), p53 and p21, as well as osteogenic markers, i.e. collagen type 1 (Coll-1), osteopontin (Opn), osteocalcin (Ocl) and runt-related transcription factor 2 (Runx-2). The levels of microRNA (miRNA/miR) involved in the regulation of osteogenic genes were determined, including miR-7, miR-21, miR-124 and miR-223. Results: The analysis revealed that the obtained coatings are cytocompatible and may increase the metabolism of pre-osteoblast, which was correlated with increased mitochondrial membrane potential and extensive development of the mitochondrial network. The obtained coatings affected the viability and proliferative status of cells, reducing the population of actively dividing cells. However, in cultures propagated on ZrO 2 ALD coatings, the up-regulation of genes essential for bone metabolism was noted. Discussion: The data obtained indicate that ZrO 2 coatings created using the ALD method may have pro-osteogenic properties and may improve the metabolism of bone precursor cells. Given the above, further development of ZrO 2 ALD layers is essential in terms of their potential clinical application in bone regenerative medicine.

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“…The central slit size was typically 15 microns. With this setup, a very good resolution can be obtained: film thicknesses up to 450 nm have been measured 11. Step sizes and step times were variable and chosen according to the intensity measured during fast prescans in small angular intervals in order to have at least 1 000 counts par step.…”

Section: Experimental Partmentioning

confidence: 99%

Mechanisms Involved in the Conversion of ppHMDSO Films into SiO₂‐Like by Oxygen Plasma Treatment

Granier

Borvon

Bousquet

et al. 2006

Plasma Processes & Polymers

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Summary: Thin ppHMDSO plasma polymer films deposited in a low pressure hexamethyldisiloxane plasma have been exposed to oxygen plasmas ignited in the same reactor at different pressures. The time evolution of the ppHMDSO film during the oxygen plasma treatment (30 s to one hour) was monitored in situ by multi‐wavelength ellipsometry. The treated films were analysed ex situ by X‐ray reflectometry, spectroscopic ellipsometry and infrared spectroscopy. On the other hand, the oxygen atom density as well as the oxygen ion density and energy were measured by actinometry and Langmuir probe measurements, respectively. For all the investigated oxygen plasma conditions, the film thickness and extinction coefficient significantly decrease. If the O 2+ ion energy is low enough (typically less than 10 eV) the 65nm ppHMDSO can even be transformed into a 45 nm‐thick carbon free SiO2‐like film. In contrast, if the ion energy is higher than 10 eV, the ppHMDSO is only partially oxidised. Based on the oxygen atom flux measurement, it is concluded that the number of oxygen atoms impinging on the ppHMDSO film is not the only parameter which governs the treatment. The oxygen ion energy appears to have a key role as far as energetic ions are likely to induce the formation of a dense superficial SiO2 layer which prevents the diffusion of O atoms in the film and the out diffusion of volatile oxidation products.

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Mass density determination of thin organosilicon films by X-ray reflectometry

Cited by 16 publications

References 18 publications

X-Ray and Neutron Reflectometry Study of Glow-Discharge Plasma Polymer Films

X-Ray and Neutron Reflectometry Study of Glow-Discharge Plasma Polymer Films

<p>Zirconium Oxide Thin Films Obtained by Atomic Layer Deposition Technology Abolish the Anti-Osteogenic Effect Resulting from miR-21 Inhibition in the Pre-Osteoblastic MC3T3 Cell Line</p>

Mechanisms Involved in the Conversion of ppHMDSO Films into SiO₂‐Like by Oxygen Plasma Treatment

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Mass density determination of thin organosilicon films by X-ray reflectometry

Cited by 16 publications

References 18 publications

X-Ray and Neutron Reflectometry Study of Glow-Discharge Plasma Polymer Films

X-Ray and Neutron Reflectometry Study of Glow-Discharge Plasma Polymer Films

<p>Zirconium Oxide Thin Films Obtained by Atomic Layer Deposition Technology Abolish the Anti-Osteogenic Effect Resulting from miR-21 Inhibition in the Pre-Osteoblastic MC3T3 Cell Line</p>

Mechanisms Involved in the Conversion of ppHMDSO Films into SiO2‐Like by Oxygen Plasma Treatment

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Mechanisms Involved in the Conversion of ppHMDSO Films into SiO₂‐Like by Oxygen Plasma Treatment