MASK RECORDING TECHNIQUE OF ON MULTILAYERED COATINGS (part 2)

Abstract

The experimental determination of the reflection coefficients in the visible region of the spectrum of chromium oxide films unexposed and exposed to laser radiation was performed. The reflection coefficients were measured using a Linza - 150 spectrophotometer (operating spectrum range from 380 to 1700 nm). The obtained characteristic values of the reflection coefficients of samples of chromium oxide films at different wavelengths are presented in the table and in the form of graphs. It was found that the reflectance of the chromium oxide film before exposure to laser radiation monotonically decreases with increasing wavelength from 380 to 450 nm, with a further increase in wavelength to 630 nm, the reflectance increases monotonically. This work is part of the development of a technique for recording masks by focused laser radiation on multilayer absorbing coatings.