Mask-Moving-Lithography-Based High-Precision Surface Fabrication Method for Microlens Arrays
Jianwen Gong,
Ji Zhou,
Junbo Liu
et al.
Abstract:Microlens arrays, as typical micro-optical elements, effectively enhance the integration and performance of optical systems. The surface shape errors and surface roughness of microlens arrays are the main indicators of their optical characteristics and determine their optical performance. In this study, a mask-moving-projection-lithography-based high-precision surface fabrication method for microlens arrays is proposed, which effectively reduces the surface shape errors and surface roughness of microlens array… Show more
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