2015
DOI: 10.1002/adma.201503289
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Mask‐Free Patterning of High‐Conductivity Metal Nanowires in Open Air by Spatially Modulated Femtosecond Laser Pulses

Abstract: A novel high-resolution nanowire fabrication method is developed by thin-film patterning using a spatially modulated femtosecond laser pulse. Deep subwavelength (≈1/13 of the laser wavelength) and high conductivity (≈1/4 of the bulk gold) nanowires are fabricated in the open air without using masks, which offers a single-step arbitrary direct patterning approach for electronics, plasmonics, and optoelectronics nanodevices.

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Cited by 75 publications
(45 citation statements)
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“…Recently, good synthetic performance and universality in materials make the laser sintering become a rapid and widely-used prototype technique. At present, laser sintering has been successfully industrialized for a pressure-less, mask-less, and scalable manufacturing route [15,16], which provides versatile material synthesis by forming three-dimensional net structure in a single operation. The ceramics materials synthesized by laser sintering have brought various applications with vast commercial values.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, good synthetic performance and universality in materials make the laser sintering become a rapid and widely-used prototype technique. At present, laser sintering has been successfully industrialized for a pressure-less, mask-less, and scalable manufacturing route [15,16], which provides versatile material synthesis by forming three-dimensional net structure in a single operation. The ceramics materials synthesized by laser sintering have brought various applications with vast commercial values.…”
Section: Introductionmentioning
confidence: 99%
“…This method arises as a low‐cost approach with minimal processing steps. Vacuum‐free, mask‐less, and scalable manufacturing of different structures has been successfully demonstrated with laser sintering . However, high laser power density is always required in this process, limiting its further development.…”
Section: Introductionmentioning
confidence: 99%
“…Novel techniques have also been developed in order to achieve higher resolution and control in nanowire fabrication. For example, Wang et al added a spatial light modulator in the micromachining setup to overcome the diffraction limit and produce gold wires at nanoscale [127]. The comparison between the laser-ablated and conventional photolithography IDEs was evaluated using electrical impedance spectroscopy [128].…”
Section: Gold Ablation For Designing Microelectrodesmentioning
confidence: 99%