2017
DOI: 10.1063/1.4984058
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Martensitic transformation in NiMnGa/Si bimorph nanoactuators with ultra-low hysteresis

Abstract: We report on the fabrication and in-situ characterization of temperature-dependent electrical resistance and deflection characteristics of free-standing NiMnGa/Si bimorph cantilevers with a NiMnGa layer thickness of 200 nm and a minimum lateral width of 50 nm. The martensitic transformation in the initial NiMnGa/Si bimorph films and nanomachined NiMnGa/Si bimorph cantilevers proceeds in a wide temperature range with a hardly detectable temperature hysteresis width below 1 K. This remarkable behavior is ascribe… Show more

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Cited by 12 publications
(8 citation statements)
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“…The temperature dependence of the transition stress for loading and unloading processes is displayed in Figure (e), showing a decreasing hysteresis with increasing temperature that finally disappears at a critical stress. This is consistent with the previously analyzed phase diagram showing a weakening of the first order character of the transition that finally becomes a continuous second order transition, as observed in experiments . The black line in Figure (e) corresponds to the homogeneous equilibrium transition stress.…”
Section: Resultssupporting
confidence: 92%
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“…The temperature dependence of the transition stress for loading and unloading processes is displayed in Figure (e), showing a decreasing hysteresis with increasing temperature that finally disappears at a critical stress. This is consistent with the previously analyzed phase diagram showing a weakening of the first order character of the transition that finally becomes a continuous second order transition, as observed in experiments . The black line in Figure (e) corresponds to the homogeneous equilibrium transition stress.…”
Section: Resultssupporting
confidence: 92%
“…The stress‐dependent strain, magnetization ( m x component), and temperature in the absence of a magnetic field are shown with black lines in Figure (a)–(c), respectively. From panel (a), notice that as σ increases, the first‐order character of the ferroelastic transition weakens and for a critical stress (indicated by the dotted lines) it finally becomes a second order one with the consequent suppression of hysteresis, in agreement with experimental observations . Again, σ < 0 ( σ > 0) permits both signs for m x ( m y ).…”
Section: Resultssupporting
confidence: 83%
“…On the other hand, the finite elements simulations conducted in Ref. enabled estimation of an average residual tensile stress in the film 6, which is also a part of cantilever in Figure , to be equal to about 300 MPa, the value being in line with the measured internal stresses in Ni–Mn–Ga/substrate thin films known from the literature . As matter of fact, this value of internal stress predetermines the temperature range, namely 340–420 K, where the nearly anhysteretic anomaly is observed in the right panel of Figure .…”
Section: Anhysteretic Behavior Of Ferromagnetic Sma Films and Nanobeamssupporting
confidence: 77%
“…The dependence reveals a strain change due to the two‐way shape memory effect via almost anhysteretic MT. Parallel measurements of the corresponding resistivity curves confirmed the temperature hysteresis width below 1 K . This remarkable deformational behavior is attributed to the close‐to‐postcritical state of the film and nanobeam, since it is feasible that the internal stress and temperature range of anomaly exceed the stress and temperature corresponding to the critical point in the phase diagram described in Sections 2 and 3.…”
Section: Anhysteretic Behavior Of Ferromagnetic Sma Films and Nanobeamsmentioning
confidence: 52%
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