Two-dimensional processes of nickel electrodeposition in LIGA microfabrication were modeled using the finite-element method and a fully coupled implicit solution scheme via Newton's technique. Species concentrations, electrolyte potential, flow field, and positions of the moving deposition surfaces were computed by solving the species-mass, charge, and momentum conservation equations as well as pseudo-solid mesh-motion equations that employ an arbitrary Lagrangian-Eulerian (ALE) formulation. Coupling this ALE approach with repeated re-meshing and re-mapping makes it possible to track the entire transient deposition processes from start of deposition until the trenches are filled, thus enabling the computation of local current densities that influence the microstructure and functional/mechanical properties of the deposit.
IntroductionElectroforming or electrodeposition is a key process in LIGA microfabrication. The process involves multidimensional, transient phenomena that include metalreduction electrochemical reactions on moving deposition surfaces and transport of charged and neutral species via diffusion, electro-migration, and convection in a centimeter-scale electrolyte-bath region and in micron-scale feature trenches. Computational modeling can help in the understanding of these complex, coupled phenomena and aid in elucidating the mechanisms involved. Specifically, by computing local current densities along the moving deposition surfaces, one can relate deposit microstructure (which controls the functional and mechanical properties of the structure) to process conditions (e.g., applied current load, bath composition, pH, and temperature) and trench geometries (widths, aspect ratios), provided that constitutive models relating current density to microstructure (e.g., grain size and orientation) and microstructure to functional/mechanical properties are available.Pioneering work was carried out by Griffiths et al.[1], who developed one and two-dimensional numerical models describing electrodeposition of metal into high aspect-ratio molds. Their one-dimensional model describes dissociation, diffusion, electromigration, and deposition of multiple ionic species; their two-dimensional model focuses on single-species transport including forced flow due to bath stirring and buoyancyinduced natural convection due to density variations. However, transient and moving boundary effects were neglected in that study. Recently, we developed and demonstrated a multi-dimensional framework for modeling time-dependent diffusion and migration of multiple charged species in a dilute electrolyte solution with reduction electrochemical reactions on moving deposition surfaces [2]. By combining the species mass conservation equations with the electroneutrality constraint, a Poisson equation for the electrolyte potential was derived. By treating the finite-element mesh as a pseudo solid and by employing repeated re-meshing (the process of generating a new finite-element mesh for the computational domain) and re-mapping (the process...