Manufacturing technology of intra- and interchip interconnects for modern ULSIs: Review and concepts of development

Valeev, A. S.; Krasnikov, G. Ya.

doi:10.1134/s1063739715030087

Cited by 12 publications

(2 citation statements)

References 6 publications

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“…Nowadays, exploring polyimide (PI) with high-performance low-k properties has received great enthusiasms due to its high thermal stability, mechanical properties, and chemical inertness. [1][2][3][4] PI has been used as interconnect dielectrics for over half a century due to its high thermal stability, mechanical properties, and chemical inertness. [5][6][7] However, commercialized PI products such as Kapton H, Upilex-S, ULTEM 1000 present high dielectric constant with the values of 3.1-3.5.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of low dielectric constant polyimide/TiO₂ nanofibers with enhanced UV-light shielding properties

Wang

Gong

Shen

et al. 2018

High Performance Polymers

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Polyimide (PI)/titanium dioxide (TiO2) composite nanofibers (NFs) with average diameters of 200–250 nm were synthesized via electrospinning. The total number density of dipoles decreased significantly, owing to the porous structures and compact interface between TiO2 NPs and PI matrix. All PI/TiO2 NFs maintain low dielectric constants and losses. For example, the dielectric constants of PI/TiO2-6% NFs are all lower than 2.6, being exposed to temperatures from 25°C to 200°C. Meantime, the dielectric losses of PI/TiO2-6% NFs are below 0.005. For ultraviolet (UV)-light shielding performance, the PI/TiO2 NFs exhibited good UV-light shielding and corresponding anti-photoaging properties. The reason can be ascribed from high UV-light absorption and scattering ability in the TiO2 NPs. The best UV-light absorption (average: 3.71) and corresponding absorption decay (15.13%) were achieved for optimized PI/TiO2-6% NFs. Other fundamental characteristics, such as the thermal stability, mechanical tensile property, and hydrophobicity, were also investigated. Such low dielectric constant PI/TiO2 composite NFs can be alternatively chosen under a longtime UV-light exposing condition.

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Section: Introductionmentioning

confidence: 99%

Fabrication of low dielectric constant polyimide/TiO₂ nanofibers with enhanced UV-light shielding properties

Wang

Gong

Shen

et al. 2018

High Performance Polymers

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show abstract

“…

Nowadays, the increasing amounts of data generated in various fields of human activity lead to new challenges for computing, chip-to-chip interconnect, telecom, and storage devices. [1] These challenges include not only the requirements for operation frequency, speed, and computation bandwidth, but also for effective power consumption. [2,3] Integrated photonics promise several approaches to solve problems arising in optical communication systems, [4,5] parallel, [6] and quantum [7,8] computing.

…”

mentioning

confidence: 99%

Energy‐Efficient Photonic Memory Cell with Spatially Separated Recording/Erasing and Readout Channels

Makarov

Minnullin

Sapegin

et al. 2022

Physica Status Solidi (b)

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Phase‐change material Ge2Sb2Te5 (GST) is a promising candidate for nonvolatile photonic devices due to its phase stability, different absorption coefficients in the amorphous and crystalline phase, and relatively fast response. Here, an energy‐efficient design of a photonic nonvolatile memory that stores its logical status as GST phase states is proposed. The device is based on the silicon‐on‐insulator (SOI) substrate and consists of the fourfold symmetric strip waveguide crossing incorporated with the square GST patch and a multimode interference (MMI) loop reflector. The distinctive feature of the proposed cell is two spatially separated recording/erasing and readout channels. One of the crossed waveguides is connected to the MMI loop reflector and used for recording/erasing. The other waveguide is used for readout. The numerical simulation of the light transmission through the device in question shows that the MMI loop reflector provides 45% and 80% higher absorption values in comparison with waveguide end reflector and straightforward transmission, respectively. This fact allows the more efficient utilization of the guided mode energy and makes the proposed photonic memory cell an attractive node element for photonic integrated circuits.

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Electroless deposited ternary alloys: third element chemical state, localisation and influence on the properties. A short review

Armyanov

Valova

Tatchev

et al. 2017

Transactions of the IMF

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Manufacturing technology of intra- and interchip interconnects for modern ULSIs: Review and concepts of development

Cited by 12 publications

References 6 publications

Fabrication of low dielectric constant polyimide/TiO₂ nanofibers with enhanced UV-light shielding properties

Fabrication of low dielectric constant polyimide/TiO₂ nanofibers with enhanced UV-light shielding properties

Energy‐Efficient Photonic Memory Cell with Spatially Separated Recording/Erasing and Readout Channels

Electroless deposited ternary alloys: third element chemical state, localisation and influence on the properties. A short review

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Manufacturing technology of intra- and interchip interconnects for modern ULSIs: Review and concepts of development

Cited by 12 publications

References 6 publications

Fabrication of low dielectric constant polyimide/TiO2 nanofibers with enhanced UV-light shielding properties

Fabrication of low dielectric constant polyimide/TiO2 nanofibers with enhanced UV-light shielding properties

Energy‐Efficient Photonic Memory Cell with Spatially Separated Recording/Erasing and Readout Channels

Electroless deposited ternary alloys: third element chemical state, localisation and influence on the properties. A short review

Contact Info

Product

Resources

About

Fabrication of low dielectric constant polyimide/TiO₂ nanofibers with enhanced UV-light shielding properties

Fabrication of low dielectric constant polyimide/TiO₂ nanofibers with enhanced UV-light shielding properties