Manufacturing silicon immersion gratings on 150-mm material

Kidder, Benjamin; Brooks, Cynthia B.; Grigas, Michelle; Hickman, Sierra; Jaffe, D. T.

doi:10.1117/12.2314271

Cited by 5 publications

(5 citation statements)

References 7 publications

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“…We will not report on all of these instruments in this overview as they are covered in other reports in these proceedings. 27,28,29,30,31 The G-CLEF (GMT-Consortium Large Earth Finder) high-resolution optical spectrograph is the most mature GMT instrument at this time. 27 This instrument is being developed by a team at the Harvard-Smithsonian Center for Astrophysics with collaborators at several other institutions.…”

Section: Scientific Instrumentsmentioning

confidence: 99%

Overview and status of the Giant Magellan Telescope project

Fanson¹,

Bernstein

Angeli³

et al. 2020

Ground-Based and Airborne Telescopes VIII

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Section: Scientific Instrumentsmentioning

confidence: 99%

Overview and status of the Giant Magellan Telescope project

Fanson¹,

Bernstein

Angeli³

et al. 2020

Ground-Based and Airborne Telescopes VIII

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Section: Scientific Instrumentsmentioning

confidence: 99%

Overview and status of the Giant Magellan Telescope project

McCarthy¹,

Ashby²,

Bigelow³

et al. 2018

Ground-Based and Airborne Telescopes VII

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The Giant Magellan Telescope project is proceeding with design, fabrication, and site construction. The first of the seven required 8.4-m primary mirror segments is completed and in storage, three segments are in various stages of grinding and polishing, and the fifth segment has been cast. Industry contracts are underway to complete the design of the telescope structure. Residence buildings and other facilities needed to support construction at the Las Campanas site in Chile are complete. Hard rock excavation is imminent in preparation for the pouring of concrete for the telescope pier and other foundations. Computational fluid dynamics analysis is informing the design of the telescope enclosure, and further construction work packages are being readied for tender. Seismic design considerations have resulted in the incorporation of a seismic isolation system into the telescope pier, as well as modifications to the primary mirror support system. Designs for the fast-steering and adaptive secondary mirrors, science instruments, and other subsystems are maturing. Prototyping is underway in various aspects, including on-sky testing of wavefront sensing and control elements, and the telescope metrology system. Our fabrication and construction schedule calls for engineering first light with a subset of primary mirror segments in late 2023, with buildout to the full configuration occurring in stages, paced by the availability of primary mirror segments and other components.

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“…The magnification of the resolving power by the high refractive index of silicon enables the design of more compact and lower-mass spectrometers, as was first suggested by Dekker. 5 High-resolution spectrometers based on silicon immersion gratings have now been developed, or are in development, for a number of ground-based [6][7][8][9][10][11][12][13] and space-based 14,15 spectrometers.…”

Section: Introductionmentioning

confidence: 99%

“…The crystal orientation of the substrate and the orientation of the etch mask relative to the crystal axes are chosen such that the subsequent hydroxide etch process results in the formation of v-shaped grating grooves with the desired blaze angle due to the strongly anisotropic etch properties of the hydroxide etch step. 7,10,13,15,17 Any fabrication process has errors that are characteristic to the process. A grating made with a lithographic process may have large-scale errors at a very low spatial frequency resulting from motion system errors in the lithography tool that was used to create a photomask or to directly pattern an etch mask.…”

Section: Introductionmentioning

confidence: 99%

“…The nitride layer is then patterned with either photo- or electron beam-lithography into a mask that is needed to create the grating through a wet etch process with potassium hydroxide (KOH) or tetramethylammonium hydroxide. The crystal orientation of the substrate and the orientation of the etch mask relative to the crystal axes are chosen such that the subsequent hydroxide etch process results in the formation of v-shaped grating grooves with the desired blaze angle due to the strongly anisotropic etch properties of the hydroxide etch step 7 , 10 , 13 , 15 , 17 …”

Section: Introductionmentioning

confidence: 99%

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Fabrication error detection in diffraction gratings with high dynamic range Fourier plane imaging and spatial filtering

Corzo-Garcia

Griesmann

2023

Opt. Eng.

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We summarize our development of a low-cost instrument for the detection of fabrication errors in diffraction gratings. Our instrument applies a low-cost digital camera and high dynamic range (HDR) imaging in the focal plane of a lens to analyze light reflected by a diffraction grating. A dynamic range close to 10 10 is achieved for a spatial frequency range that is relevant for types of errors that occur in the lithographic fabrication of gratings. We also describe a modification of the instrument in which a spatial filter is used to block the large fraction of light that does not carry information on fabrication errors. This "coronagraph" modification reduces measurement times by about an order of magnitude. A unique pseudologarithmic transformation is described for the visualization of wide range data that include zero or negative values, such as HDR images.

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Manufacturing silicon immersion gratings on 150-mm material

Cited by 5 publications

References 7 publications

Overview and status of the Giant Magellan Telescope project

Overview and status of the Giant Magellan Telescope project

Overview and status of the Giant Magellan Telescope project

Fabrication error detection in diffraction gratings with high dynamic range Fourier plane imaging and spatial filtering

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