Manufacturing of highly-dispersive, high-efficiency transmission gratings by laser interference lithography and dry etching

Koch, Felix P.; Lehr, Dennis; Schönbrodt, Oliver; Glaser, Tilman; Fechner, Renate; Frost, Frank

doi:10.1016/j.mee.2018.01.031

Cited by 19 publications

(12 citation statements)

References 21 publications

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“…For further information on the patterning using two-beam laser interference lithography, see Ref. 19. The optimized resist profiles show no residual resist layer left at the grooves and a sufficiently large duty cycle of f ≈ 0.4 (Fig.…”

Section: Methodsmentioning

confidence: 99%

“…The approach demonstrated in Ref. 19 can fortunately also be applied here and yields both higher maximum efficiencies as well as a more relaxed tolerance window, which is illustrated in Fig. 3.…”

Section: Design Considerationsmentioning

confidence: 96%

“…In a previous paper, 19 the growth of Fresnel-like reflection losses with decreasing period-to-wavelength ratio as well as methods to overcome this issue, particularly the fabrication of tapered profiles, minimizing the effective refractive index jump, were discussed. We theoretically and experimentally revealed that the reflection limited maximum efficiency of 93.2% for binary 1700 L∕mm gratings at 1030 nm in transverse electric (TE)-polarization as well as the tolerance window can be significantly increased (>96% experimentally), using trapezoidal-like profiles.…”

Section: Design Considerationsmentioning

confidence: 99%

“…There are different approaches to address the mentioned reflection losses and obtain higher diffraction efficiencies, e.g., using multilayers below or inside the corrugation, 24,29 embedded gratings, 30,31 subwavelength features, and optimized continuous profiles. 19 For this paper, we will concentrate on the last approach. For continuous profiles, the duty cycle f varies with depth and Eq.…”

Section: Design Considerationsmentioning

confidence: 99%

“…The efficiencies are this time depicted for three different side-wall angles α and two normalized periods Λ∕λ ¼ 0.642 (e.g., 3000 L∕mm, 519 nm) and (b) Λ∕λ ¼ 0.535 (e.g., 3600 L∕mm, 519 nm). Trapezoidal profiles with side-wall angles in the range of 4 deg to 6.5 deg were previously 19 found to be experimentally feasible using interference lithography and RIBE. Moreover, the range of the plot was reduced to experimentally reasonable values for f and h around the first set of efficiency maxima as a function of groove depth.…”

Section: Design Considerationsmentioning

confidence: 99%

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Reactive ion beam etching of highly dispersive, high-efficiency transmission gratings for the VIS range

et al. 2019

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Reflection losses due to refractive index mismatch limit the obtainable diffraction efficiencies for transmission gratings in the highly dispersive regime, i.e., with period to wavelength ratios smaller than 0.7. The design and fabrication of such gratings with high-diffraction efficiencies (≥94%, Littrow configuration) will be discussed with an emphasis on process strategies to control the profiles in the reactive ion beam etching step. Experimental results from the manufacturing of monolithic fused silica pulse compression gratings with 3000 L∕mm optimized for a center wavelength of 519 nm will be presented. The influence of different etching parameters such as etch gas mixture, ion incidence angle, and acceleration voltage of the ion source on profile depth, side-wall angle, duty cycle, and ultimately diffraction efficiencies will be discussed.

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Section: Methodsmentioning

confidence: 99%

Section: Design Considerationsmentioning

confidence: 96%

Section: Design Considerationsmentioning

confidence: 99%

Section: Design Considerationsmentioning

confidence: 99%

Section: Design Considerationsmentioning

confidence: 99%

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Reactive ion beam etching of highly dispersive, high-efficiency transmission gratings for the VIS range

et al. 2019

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Pantographic beam: a complete second gradient 1D-continuum in plane

Barchiesi

Eugster

Placidi

et al. 2019

Z. Angew. Math. Phys.

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There is a class of planar 1D-continua which can be described exclusively by their placement functions which in turn are curves in a two-dimensional space. In contrast to the Elastica for which the deformation energy depends on the projection of the second gradient to the normal vector of the placement function, i.e. the material curvature, the proposed continuum does also depend on the projection onto the tangent vector, introduced as the stretch gradient. Thus, the deformation energy takes into account the complete second gradient of the placement function. In such a model, nonstandard boundary conditions and more generalized forces such as double forces do appear. The deformation energy of the continuum is obtained by applying a heuristic homogenization procedure to a family of slender discrete pantographic structures constituted by extensional and rotational springs. Within the homogenization process, the overall length of the system is kept fixed, the number of the periodically appearing subsystems , called cells, is increased, and the stiffnesses are appropriately scaled. For two examples, we numerically compare the family of discrete systems with the continuum. The analysis shows that the continuum represents the behaviour of the discrete system already for a relatively moderate number of cells. In particular, the behaviour of the deformation energy error between the discrete and the continuum models when the number of cells tends to infinity is determined by the homogenization process.

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Multi-scale and multi-physics: towards next-generation engineering materials

Barchiesi

2020

Continuum Mech. Thermodyn.

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Manufacturing of highly-dispersive, high-efficiency transmission gratings by laser interference lithography and dry etching

Cited by 19 publications

References 21 publications

Reactive ion beam etching of highly dispersive, high-efficiency transmission gratings for the VIS range

Reactive ion beam etching of highly dispersive, high-efficiency transmission gratings for the VIS range

Pantographic beam: a complete second gradient 1D-continuum in plane

Multi-scale and multi-physics: towards next-generation engineering materials

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