2005
DOI: 10.1088/0960-1317/15/10/016
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Manufacture of high-aspect-ratio micro-hair sensor arrays

Abstract: Arrays of microposts or micropillars find a variety of applications and one of their key properties is the aspect ratio (AR) of the individual posts. This parameter, for example, determines the sensitivity of micropost force field sensors. A concept for the manufacture of arrays of micro-hairs is presented allowing us to create extremely high AR of the filiform micro-hairs. The concept is based on a ‘lost mould process’ allowing for frictionless de-moulding of the sensor array by melting respectively dissoluti… Show more

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Cited by 31 publications
(17 citation statements)
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“…Fabrication of micropost arrays with a high density and aspect ratio (micropost height/micropost diameter) has gained increased interest in recent years [Petronis et al, 2003;Mohrdieck et al, 2005;Schmitz et al, 2005]. This is essential in order to extend the micropost array-based technique to measure CTFs for cells of smaller size and/or producing less force.…”
Section: Discussionmentioning
confidence: 99%
“…Fabrication of micropost arrays with a high density and aspect ratio (micropost height/micropost diameter) has gained increased interest in recent years [Petronis et al, 2003;Mohrdieck et al, 2005;Schmitz et al, 2005]. This is essential in order to extend the micropost array-based technique to measure CTFs for cells of smaller size and/or producing less force.…”
Section: Discussionmentioning
confidence: 99%
“…1). Micropillars were fabricated according the method described by Schmitz et al (2005). In all experiments, pillars with a diameter of 50 m and lengths of 500 m were used.…”
Section: Methodsmentioning
confidence: 99%
“…10,11 The use of flexible, permeable media to bound a flowing fluid is also acquiring momentum in applications related to both sensing [12][13][14] and manipulating [15][16][17][18][19][20][21][22] near-wall transitional and turbulent structures. Such media often take the form of dense bundles of pillars, hinged at a rigid base and free to vibrate under the forcing provided by the fluid, so that elastic potential energy can be easily transferred to the fluid and back.…”
Section: Introductionmentioning
confidence: 99%