Manipulation of Polymer Solubility: Crosslinking, Thermal Activation and Variable-Temperature Bakes
Jacob Sitterly,
Justin Nhan,
Robert Brainard
Abstract:A two-layer polymeric stack is designed to be converted to a three-layer stack using sequential bakes. The three-layer stack is composed of layers that are (bottom to top): insoluble, soluble, and insoluble in 0.26 N TMAH developer. The two-layer stack is composed of a bottom layer that is a 193-nm positive tone resist containing a thermal acid generator (TAG) and, optionally, a crosslinker. The top layer contains a t-butyl acrylate monomer that can be deprotected by catalytic acid. During the sequential bakes… Show more
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