2019
DOI: 10.1007/s00339-019-2644-3
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Manipulation of ion energies in pulsed laser deposition to improve film growth

Abstract: The growth and crystallinity of oxide thin films using a physical vapour deposition technique like molecular beam epitaxy (MBE) or pulsed laser deposition (PLD) is influenced by the flux of materials, the kinetic energy of species, and the substrate temperature. PLD is generating on a short time scale (µs) a large flux of materials, species with large kinetic energies (few eV up to several 10 eV), and requires often higher growth temperatures as compared to oxide MBE. Here, we show as a proof of principle that… Show more

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Cited by 7 publications
(4 citation statements)
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References 49 publications
(66 reference statements)
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“…Figure 2 shows SEM images and the X-ray photo-electron spectroscopy (XPS) characterization of the surfaces after TiO 2 deposition. A cobalt oxide CoO x cocatalyst layer was deposited using a pulsed laser deposition (PLD) setup based on a 248 nm wavelength KrF eximer laser [13]; PLD is a practical method to deposit materials from targets with complex composition at a fast deposition rate. The resultant surface morphology was inspected by SEM.…”
Section: Tio 2 and Coo X Cocatalyst Depositionmentioning
confidence: 99%
“…Figure 2 shows SEM images and the X-ray photo-electron spectroscopy (XPS) characterization of the surfaces after TiO 2 deposition. A cobalt oxide CoO x cocatalyst layer was deposited using a pulsed laser deposition (PLD) setup based on a 248 nm wavelength KrF eximer laser [13]; PLD is a practical method to deposit materials from targets with complex composition at a fast deposition rate. The resultant surface morphology was inspected by SEM.…”
Section: Tio 2 and Coo X Cocatalyst Depositionmentioning
confidence: 99%
“…Figure 2 shows SEM images and X-ray photo-electron spectroscopy (XPS) characterisaiton of the surfaces after TiO 2 deposition. A cobalt oxide CoO x cocatalyst layer was deposited using pulsed laser deposition (PLD) setup based on a 248 nm wavelength KrF eximer laser [13]; PLD is a practical method to deposit materials from targets with complex composition at fast deposition rate. Surface morphology was inspected by SEM.…”
Section: Methodsmentioning
confidence: 99%
“…In this case, both pulsed laser deposition (PLD) and magnetron sputtering (MSP) ensure conformal surface coating. PLD generates short time (µs) fluxes of condensable species with large kinetic energies (a few eV up to several tens eV) [20]. This favors layer-by-layer growth and, therefore, film crystallinity and conformal edge coverage.…”
Section: Néel Coupling At the Interfacementioning
confidence: 99%