2020
DOI: 10.1007/978-3-030-51362-7
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Manipulating Anisotropic Transport and Superconductivity by Focused Ion Beam Microstructuring

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Cited by 3 publications
(1 citation statement)
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“…In SIBM, energetic ions are poured over the whole substrate. In FIBM, ions are concentrated on a spot directed to a particular workpiece part [ 196 ]. Although SIBM is slower and more controlled, it can be used as RIE.…”
Section: Techniques Of Preparation Of Mns (Mns)mentioning
confidence: 99%
“…In SIBM, energetic ions are poured over the whole substrate. In FIBM, ions are concentrated on a spot directed to a particular workpiece part [ 196 ]. Although SIBM is slower and more controlled, it can be used as RIE.…”
Section: Techniques Of Preparation Of Mns (Mns)mentioning
confidence: 99%