1998
DOI: 10.1134/1.1187616
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Manifestations of the deneutralization of mobile charges in SiO2 in the spectroscopy of the silicon-oxide interface

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“…There exists a number of papers (see, e.g., [3][4][5][6][7]) devoted to investigations of the effect of such external actions as thermal treatment and -irradiation on the parameters of interfaces. As to the effect of pressure, the available works deal predominantly with an analysis of the bulk properties variation in the layers of MOS structures [8][9][10][11].…”
Section: Introductionmentioning
confidence: 99%
“…There exists a number of papers (see, e.g., [3][4][5][6][7]) devoted to investigations of the effect of such external actions as thermal treatment and -irradiation on the parameters of interfaces. As to the effect of pressure, the available works deal predominantly with an analysis of the bulk properties variation in the layers of MOS structures [8][9][10][11].…”
Section: Introductionmentioning
confidence: 99%