Malignolipin

Kosaki, Takekazu

doi:10.2169/internalmedicine1962.2.275

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Motion and Collision Of Electrons1

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2002

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“…32) We consider nine types of electron-Cl 2 collisions and 11 types of electron-Cl collisions on the basis of the cross section data of Morgan et al 33) We also consider 27 types of electron-Ar collisions on the basis of the cross section data of Kosaki and Hayashi. 28) The set of cross sections for electron-Ar collisions is given in ref. 27.…”

Section: Motion and Collision Of Electronsmentioning

confidence: 99%

Electron Energy Distributions in Inductively Coupled Plasma: Comparison of Chlorine Discharge with Argon Discharge

Yonemura

Nanbu

Sakai

2002

Jpn. J. Appl. Phys.

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The characteristics of the electron energy distribution functions (EEDFs) in inductively-coupled discharges of chlorine and argon gases are studied numerically. The EEDFs in atomic gases such as Ar and Cl show the three-temperature distribution with depletion in the high-energy region and enhancement in the low-energy region. By contrast, the EEDF for Cl 2 shows the bi-Maxwellian distribution close to the Maxwellian one. The reason for this difference is explained by the difference of electronic inelastic collision cross sections between atomic and molecular gases. The EEDFs obtained in the present simulation agree with the earlier experimental results qualitatively.

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Section: Motion and Collision Of Electronsmentioning

confidence: 99%