2018
DOI: 10.1080/00207543.2018.1444809
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Maintenance, shutdown and production scheduling in semiconductor robotic cells

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Cited by 11 publications
(5 citation statements)
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“…Analysis of synergies and challenges between maintenance and production functions are often presented in literature. For example, Tonke and Grunow (2018) studied the integration of production and maintenance plans, by scheduling shutdowns during periods of overcapacity to reduce wear and tear on equipment, and Muchiri et al (2014) highlighted the need of combining knowledge of operating and maintenance practices for asset performance analysis and optimisation.…”
Section: Summary Of Findings and Remarksmentioning
confidence: 99%
“…Analysis of synergies and challenges between maintenance and production functions are often presented in literature. For example, Tonke and Grunow (2018) studied the integration of production and maintenance plans, by scheduling shutdowns during periods of overcapacity to reduce wear and tear on equipment, and Muchiri et al (2014) highlighted the need of combining knowledge of operating and maintenance practices for asset performance analysis and optimisation.…”
Section: Summary Of Findings and Remarksmentioning
confidence: 99%
“…A semiconductor manufacturing system is a typical complex manufacturing system containing hundreds or thousands of processing steps [1,2]. Unlike conventional manufacturing and assembly systems, semiconductor manufacturing involves a re-entrant phenomenon, in which a workpiece may queue for its turn to be processed by one piece of equipment and visit this equipment repeatedly [3].…”
Section: Introductionmentioning
confidence: 99%
“…It is known that usually Robotic cells entail an input/output device for sections entering and going out of the cell, units of processing able to carry out different process steps, and a one or two grippers entailing robot. It is able to transport all the parts between processing units [6,7]. Additionally, robotic cells are mainly divided by two classes: a group containing a process of inspection built into the operations of a multi-function robot (MFR), and another category lacking inspection [8].…”
Section: Introductionmentioning
confidence: 99%